Orthogonal Beam Stage Coordinate Alignment
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Solution Overview
Problem
Conventional composite charged particle beam apparatuses with orthogonally arranged ion and electron beams face operability issues due to mismatched coordinate systems for stage movement, leading to potential erroneous operations during sample positioning.
Innovation Solution
A composite charged particle beam apparatus with orthogonally arranged focused ion and electron beams, including a sample stage, detectors, observation image formation, optical microscopy, and a display system that allows for coordinate system alignment and stage control to match the movement direction with each beam's image, enabling precise and safe sample positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the focused ion beam and electron beam are orthogonally arranged, then the processed cross-section can be observed from a vertical direction without moving the sample stage, but the coordinate systems of the observation images do not coincide with the stage drive directions, causing erroneous operations
Solution Approach 1:
The patent introduces a coordinate transformation mechanism that maps between the orthogonal beam coordinate systems and the stage drive coordinate systems. This adds a dimensional transformation layer that reconciles the 90-degree angular difference between beam arrangements, allowing accurate positioning in both observation modes without operational confusion
Solution Approach 2:
The control system acts as an intermediary that receives stage position commands and converts them into the appropriate coordinate system for the currently active observation mode. This mediator translates between the orthogonal ion beam coordinates and electron beam coordinates, preventing erroneous operations while maintaining the orthogonal arrangement benefits
2Ease of operation
If the ion beam and electron beam observe the same plane, then the observation image directions coincide with the stage drive direction, but the processed cross-section cannot be observed from a vertical direction
Solution Approach 1:
The patent implements dynamic coordinate system switching that adapts to the active observation mode. When ion beam observation is active, the system uses ion beam coordinates; when electron beam observation is active, it switches to electron beam coordinates. This dynamic adaptation allows the orthogonal arrangement to maintain operational simplicity while achieving vertical observation capability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and safe adjustment of the sample stage by aligning the movement direction with the respective coordinate systems of the focused ion beam and electron beam images, preventing erroneous operations and ensuring precise sample positioning.
Implementation Method 1
a detector for detecting a secondary particle generated from the sample
Implementation Method 2
a focused ion beam column
Implementation Method 3
an electron beam column, which is arranged substantially at a right angle with respect to the focused ion beam column
Data Source
AI summary
A composite charged particle beam apparatus comprises an FIB column and an SEM column arranged so that the ion and the electron beam irradition axes intersect with each other substantially at a right angle. A sample stage mounts a sample, and a detector detects secondary particles generated from the sample when irradiated with the ion beam or the electron beam. An observation image formation portion forms an FIB image and an SEM image based on a detection signal of the detector. An optical microscope observes the sample, and a display portion displays the FIB image, the SEM image and an optical microscope image. A stage control portion changes the coordinate system of the sample stage to any selected one of the coordinate systems of the FIB image, the SEM image and the optical microscope image.