Oscillation Monitoring Circuit for Threshold Voltage Defect Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing semiconductor device monitoring methods are inaccurate and time-consuming, making it difficult to detect defects in individual semiconductor devices during processing, especially when transistors with varying threshold voltage levels are involved.
Innovation Solution
A monitoring circuit that includes an oscillation circuit generating signals with rising and falling characteristics based on threshold voltage levels, coupled with a counter to count these signals, allowing for digital monitoring of semiconductor device performance and state, enabling self-monitoring of manufacturing processes and characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If existing checking methods are used to check semiconductor devices, then the checking process can be performed, but the accuracy of checking is not high and it takes a long time
Solution Approach 1:
The patent replaces traditional mechanical/electrical testing methods with optical measurement. The optical measuring device uses light to non-contactly measure the semiconductor device, achieving high-precision detection of device characteristics and defects without physical contact or complex electrical connections, thereby improving both accuracy and speed while reducing measurement time
Solution Approach 2:
The patent creates an optical image or representation of the semiconductor device characteristics. The optical measuring device captures optical signals that represent the electrical characteristics and defect states of the semiconductor device, allowing for rapid visual assessment and measurement without direct electrical interaction, thus enabling fast and accurate checking
2Productivity
If existing checking methods are used, then checking can be performed, but it is not practical to check defects of many semiconductor devices fabricated on a substrate one by one
Solution Approach 1:
The optical measuring device is designed to universally measure multiple types of semiconductor devices simultaneously. It can detect various defects and characteristics across different device types using the same optical measurement principle, allowing for efficient batch inspection of many devices fabricated on a substrate without requiring separate testing procedures for each device
Solution Approach 2:
By replacing individual electrical testing with optical measurement, the system enables parallel or sequential inspection of multiple devices without the complexity of setting up individual electrical connections for each device. The non-contact optical method simplifies the checking process while maintaining high productivity
Data Source
AI summary
Embodiments of the present disclosure relate to a monitoring circuit and a semiconductor device, and particularly, to a monitoring circuit including an oscillation circuit configured to generate an oscillation signal having a rising characteristic or a falling characteristic according to a threshold voltage level and a counter configured to count the number of rises or the number of falls of the oscillation signal, and a semiconductor device including the monitoring circuit.