Overdoped Conduction Mesh for Photodetection Stability

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Solution Overview

Problem

Diode array photo-detectors face challenges in sensitivity due to electrical resistance in the substrate, leading to variations in polarization and charge transfer issues, as well as defects at the interface between the passivation layer and semiconductor regions, which reduce photonic signal quality and increase noise.

Innovation Solution

A photo-detection device with a conduction mesh formed by metal diffusion between adjacent diodes, reducing series access resistance and stabilizing the interface, combined with a peripheral substrate contact and a CdHgTe absorption layer with varying gap energy, enhancing charge collection and reducing dark current.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a diode array is used for detection of electromagnetic radiation, then the ability to capture spatio-temporal variation of light intensity is improved, but electrical resistance in the substrate induces variation in polarization and alters diode operation

Engineering Contradiction:
Improvedetection sensitivityVSAvoiddiode operation stability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The substrate is divided into multiple independently contacted regions, with each diode having its own dedicated substrate contact. This segmentation eliminates the collective RC effect and polarization variations that occur when all diodes share a common substrate contact, as each diode operates electrically independently with its own reference potential.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each diode region is provided with localized substrate contacts positioned close to the individual diodes, creating locally optimized electrical pathways. This local quality approach reduces the series resistance and RC time constants for each pixel, improving both detection sensitivity and operational stability compared to peripheral substrate contacts.

Inventive Principle:
Principle #3Local quality

2Productivity

If the number of diodes and photon flux are increased, then the detection capability is improved, but the electrical resistance effect strongly influences diode operation and slows down charge transfer

Engineering Contradiction:
Improvedetection capacityVSAvoidcharge transfer speed
Core Design Contradiction:
ProductivityVSSpeed

Solution Approach 1:

The substrate contact structure is segmented into multiple independent contacts, one for each diode or small group of diodes. This segmentation reduces the total series resistance in the charge transfer path and eliminates the collective RC effect that limits charge transfer speed in large-format detectors with high photon flux capabilities.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Substrate contacts are positioned in the plane of the substrate close to each diode, rather than only at peripheral locations. This two-dimensional distribution of contacts reduces the charge transfer distance and resistance, enabling faster charge extraction even as the detector area and diode count increase.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If interface defects and trap states are present at the passivation layer-semiconductor interface, then manufacturing is simplified, but carrier generation/recombination centers reduce photonic signal and increase thermal current

Engineering Contradiction:
Improveinterface qualityVSAvoidphotonic signal quality
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

Local substrate contacts are positioned close to each diode, creating localized electrical pathways that minimize the influence of extended interface defects and trap states in the passivation layer. This local contact approach reduces the impact of carrier generation and recombination at interface defects on the overall photonic signal quality.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The substrate contact structure extracts charges locally at each diode region before they can be significantly affected by interface defects and trap states in the passivation layer. This early charge extraction minimizes the interaction between photogenerated carriers and interface defects, reducing thermal current and improving signal quality.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves diode array sensitivity by reducing series resistance and noise, stabilizing the interface, and increasing the modulation transfer function, particularly effective in high flux and low pitch imaging applications.

Implementation Method 1

a heat treatment is performed which causes metal to diffuse into the absorption layer from the metal layer

Methodology Applied
Scientific EffectMetal diffusion: Diffusion

Implementation Method 2

a heat treatment is performed which causes metal to diffuse into the absorption layer from the metal layer and form an overdoped region under each trench

Methodology Applied
Scientific EffectThermal diffusion: Heat Treatment

Implementation Method 3

A diode array can be used to provide detection of electromagnetic radiation. It can indeed form electron-hole pairs by interaction between the electromagnetic radiation and the substrate

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP3381056B1Photodetection device which has an inter-diode array and is overdoped by metal diffusion and manufacturing method
Publication Date: 2020.09.09 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP3381056B1 patent drawingFigure 1a~2
  • EP3381056B1 patent drawingFigure 3a~3b
  • EP3381056B1 patent drawingFigure 4a~4b

AI summary

The invention relates to a photodetection device comprising a substrate and an array of diodes, the substrate including an absorption layer (1) having a first type of doping, and each diode comprising, in the absorption layer (2), a collection region which has a second type of doping opposite to the first type. The device comprises, under the surface of the substrate, a conductive mesh (7) including at least one conductive channel inserted between the collection regions (2) of two adjacent diodes, the at least one conductive channel (7) having the first type of doping and a higher doping density than the absorption layer. The doping density of the at least one conductive channel (7) is the result of a diffusion of metal in the absorption layer from a metal mesh provided on the surface of the substrate. The invention also relates to a method for manufacturing such a device.