Overlapping Dual Hands for Semiconductor Wafer Transport
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Solution Overview
Problem
Conventional industrial robots designed for transporting semiconductor wafers face interference issues with gate sections due to the Y-shaped design of their hands, which prevents efficient transportation of wafers arranged both overlapping and non-overlapping in the top-bottom direction, and increases the turning radius of the hands.
Innovation Solution
The industrial robot features first and second hands that are independently rotatable and overlap in the top-bottom direction at the base, allowing for flexible positioning to avoid interference with gate sections while maintaining a minimized turning radius, with the hands being formed to bend and have line symmetry for efficient wafer transport.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the base end side of the hand is made longer to prevent interference with gate sections, then the hands can be prevented from interfering with gate sections, but the turning radius of the hand becomes larger
Solution Approach 1:
The hand is divided into multiple sections (base end section, intermediate section, front end section) that can be independently positioned and rotated. This segmentation allows the base end section to be positioned away from gate sections while keeping the front end section functional, eliminating the need for a longer overall hand structure.
Solution Approach 2:
The hand sections are made dynamically positionable through independent rotation mechanisms. The base end section can be rotated to avoid gate sections during transport, while the hand maintains its functional configuration when needed. This dynamic adjustment resolves the contradiction between avoiding interference and maintaining compact turning radius.
2Productivity
If the two hands are arranged to overlap in the top and bottom direction to transport wafers simultaneously, then the productivity is improved, but the hands interfere with gate sections having openings
Solution Approach 1:
The hands are designed with independent rotation capability, allowing them to dynamically adjust their position. When transporting wafers through gate sections, the hands can be rotated to non-overlapping configurations to avoid interference with gate walls, while maintaining overlapping positions for efficient simultaneous wafer transport when gate interference is not an issue.
Solution Approach 2:
The relative position and orientation parameters of the two hands are changed based on the operational context. The hands can switch between overlapping and non-overlapping configurations, adjusting their spatial parameters to optimize both productivity and avoid gate section interference.
3Adaptability or versatility
If the hands are made independently rotatable with respect to the arm, then the adaptability to different arrangement locations is improved, but the device complexity increases
Solution Approach 1:
The independent rotation mechanism serves multiple functions: it enables the hands to adapt to different wafer arrangements (overlapping and non-overlapping), allows avoidance of gate section interference, and maintains the ability to transport wafers in various configurations. This multi-functionality justifies the added complexity by providing universal adaptability.
Data Source
AI summary
An industrial robot is provided with the first hand, the second hand, the arm and the main unit section. The base end portion of the first hand and the base end portion of the second hand are joined to the front end portion of the arm such that they overlap with each other in the top-bottom direction. The first hand and the second hand are independently rotatable with respect to the arm and also rotatable about the common center of rotation with respect to the arm in the view from the top-bottom direction. Also, the first hand and the second hand are formed being bent in the view from the top-bottom direction, and also formed to have line symmetry about a predetermined imaginary line passing through the center of rotation in the view from the top-bottom direction.