OVJP Patterning of OLED Upper Electrodes

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Solution Overview

Problem

Existing techniques for patterning electrodes over organic thin films in electronic devices, such as photolithography, are problematic due to chemical incompatibility with standard photolithographic methods, necessitating the development of alternative methods for organic semiconductor materials.

Innovation Solution

A method involving directed stream printing technologies like organic vapor jet printing (OVJP) is used to pattern organic materials after initial photolithography steps, allowing for the formation of electronic devices without the need for further photolithography, enabling the creation of isolated upper electrodes and organic layers in OLED displays.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If photolithography is used to pattern electrodes over organic thin films, then standard fabrication processes can be applied, but chemical incompatibility with organic semiconductor materials occurs

Engineering Contradiction:
Improvefabrication process compatibilityVSAvoidchemical compatibility
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The fabrication process is divided into two distinct stages: first, photolithography is used to pattern inorganic components (electrodes, interconnects) on the substrate; second, directed stream printing is used to pattern organic semiconductor materials. This segmentation allows each technique to be applied to materials it is chemically compatible with, resolving the contradiction between ease of manufacture and chemical compatibility.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Directed stream printing acts as an intermediary technique that bridges the gap between photolithography and organic material deposition. It enables precise patterning of organic semiconductors without direct chemical interaction with photolithographic reagents, thus maintaining both manufacturing efficiency and chemical compatibility.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If directed stream printing is used to pattern organic materials, then chemical incompatibility issues are avoided, but additional process steps are required

Engineering Contradiction:
Improvechemical compatibilityVSAvoidnumber of process steps
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines photolithography and directed stream printing into a unified fabrication sequence where both techniques work synergistically. The photolithography step creates the inorganic framework, and the directed stream printing step adds the organic functional layers, merging the advantages of both methods while minimizing overall process complexity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach avoids the limitations of conventional photolithography, enabling cost-effective and high-resolution patterning of organic electronic materials, facilitating the production of efficient and reliable electronic devices like OLED displays without the complications associated with traditional photolithographic techniques.

Implementation Method 1

In this technique, organic molecules are sublimated into a hot, inert carrier gas and expanded through microscopic nozzles forming a highly collimated gas jet

Methodology Applied
Scientific EffectSublimation: Sublimation

Implementation Method 2

The gas jet impinges on a cooled substrate to form a well-defined thin film of organic molecules

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS10283737B2OVJP patterning of electronic devices
Publication Date: 2019.05.07 THE RGT UNIV OF MICHIGAN
  • US10283737B2 patent drawing
  • US10283737B2 patent drawing
  • US10283737B2 patent drawing

AI summary

A method for forming an electronic device such as a passive color OLED display. Bottom electrodes are patterned onto a substrate in rows. Raised posts formed by photoresist are patterned into columns oriented orthogonally to the bottom row electrodes. One or more organic layers, such as R, G, B organic emissive layers are patterned over the raised posts and bottom electrodes using organic vapor jet printing (OVJP). An upper electrode layer is applied over the entire device and forms electrically isolated columnar electrodes due to discontinuities in the upper electrode layer created by the raised columnar posts. This permits patterning of the upper electrodes over the organic layers without using photolithography. A device formed by this method is also described.