Oxide Display Panel Structure With Fewer Mask Processes
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Solution Overview
Problem
The preparation of oxide backplates for high transmission fringe field switching (HFS) display modes requires at least 6 mask processes, making the process complex and increasing production costs.
Innovation Solution
A display panel structure comprising a substrate with multiple device layers, including a first device layer with a gate, a second device layer with an active part and a pixel electrode, and a third device layer with a source connected to the active part, which simplifies the manufacturing process by reducing the number of mask processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If oxide semiconductors are used for preparing high-performance LCD panels, then display performance is improved, but the number of mask processes increases to at least 6, making the process complex and production costs high
Solution Approach 1:
The patent combines the formation of the active layer and pixel electrode into a single oxide semiconductor layer that is patterned using one mask process. This merging of functions reduces the total number of mask processes from at least 6 to just 1, while still achieving the desired display performance through the integrated structure.
Solution Approach 2:
The oxide semiconductor layer serves multiple functions simultaneously: it acts as the active layer for transistor operation, the pixel electrode for display function, and the conductive element for electrical connection. This multi-functionality eliminates the need for separate layers and mask processes for each function, directly reducing process complexity.
2Reliability
If oxide semiconductors are used for preparing high-performance LCD panels, then display performance is improved, but production costs increase due to complex mask processes
Solution Approach 1:
By combining multiple functional layers into a single oxide semiconductor layer that can be formed and patterned in one mask process, the patent significantly reduces manufacturing complexity and associated costs, while preserving the high display performance enabled by oxide semiconductor technology.
Solution Approach 2:
The patent utilizes the optical properties of the oxide semiconductor layer, particularly its transparency in the pixel electrode region, to achieve display function without requiring additional colored or patterned layers. This natural optical property reduces the need for extra manufacturing steps and materials.
3Manufacturing precision
If multiple mask processes are used for oxide backplate preparation, then precise patterning is achieved, but the manufacturing process becomes complex and time-consuming
Solution Approach 1:
The patent achieves precise patterning of both the active region and pixel electrode region through a single mask process by carefully designing the mask pattern to define both functional areas simultaneously. This maintains manufacturing precision while dramatically reducing process complexity from 6+ steps to just 1 step.
Solution Approach 2:
The mask pattern is segmented into different regions: a first region for the active layer that defines the transistor active area, and a second region for the pixel electrode that defines the transparent conductive area. This segmentation within a single mask allows precise patterning of multiple functional zones in one process step.
Data Source
AI summary
A display panel and a manufacturing method thereof are provided by the present disclosure. The display panel includes a substrate, a first device layer, a second device layer and a third device layer stacked sequentially. The first device layer includes a gate. The second device layer includes an active part and a pixel electrode disposed on a side of the gate away from a substrate. The third device layer includes a source disposed on a side of the active part away from the gate. The source is connected to the active part.