Oxide Semiconductor Light Sensor Transistor Threshold Voltage Stabilization

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Solution Overview

Problem

Oxide semiconductor transistors used in light-sensing devices experience a negative threshold voltage shift over time due to stress from light and electricity, affecting their operational reliability, especially when the material is highly light-sensitive.

Innovation Solution

A light-sensing apparatus is designed with a substrate, a light sensor transistor, and a switching transistor, where the light sensor transistor includes a transparent upper electrode to apply a negative bias voltage, offsetting the change in light sensitivity and stabilizing the threshold voltage. The apparatus also features a channel layer structure with a less light-sensitive lower layer and a more light-sensitive upper layer, and a method of driving the apparatus involves applying a negative bias voltage to the upper electrode to prevent threshold voltage shifts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a light-sensitive oxide semiconductor material is used as the channel layer to increase photocurrent generation, then the light-sensing capability is improved, but the threshold voltage shifts increasingly in the negative voltage direction over time due to stress from light and electricity

Engineering Contradiction:
Improvelight-sensing capabilityVSAvoidthreshold voltage stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The channel layer is divided into two distinct layers: a first channel layer with high light-sensitivity for detecting light signals, and a second channel layer with low light-sensitivity for providing stable electrical characteristics. This segmentation allows each layer to perform its specialized function without interfering with the other, resolving the contradiction between light-sensing capability and threshold voltage stability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the channel structure are assigned different material properties: the first channel layer uses highly light-sensitive oxide semiconductor material (e.g., InZnO, GaInZnO) to maximize photocurrent generation, while the second channel layer uses less light-sensitive material (e.g., HfInZnO, AlInZnO) to ensure electrical stability. This local differentiation of material quality enables simultaneous optimization of both light-sensing performance and threshold voltage stability.

Inventive Principle:
Principle #3Local quality

2Stability of the object's composition

If the threshold voltage of the oxide semiconductor transistor is stabilized to improve operational reliability, then the ON/OFF operations become reliable, but the light-sensitivity of the channel material must be reduced

Engineering Contradiction:
Improvethreshold voltage stabilityVSAvoidlight-sensing capability
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The channel is segmented into two functional layers where the first layer specializes in light detection with high sensitivity material, while the second layer specializes in electrical stability with low light-sensitivity material. This segmentation allows the system to maintain high light-sensing capability while achieving threshold voltage stability, as each layer performs its designated function independently.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The channel structure employs a composite of two different oxide semiconductor materials with complementary properties. The first material provides high light-sensitivity for effective light detection, while the second material provides electrical stability to prevent threshold voltage shifts. The composite structure combines the advantages of both materials, achieving both high light-sensing capability and operational reliability.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution improves the operational reliability of light-sensing devices by stabilizing the threshold voltage, preventing deterioration in performance due to light-induced stress, and maintaining reliable ON/OFF operations.

Implementation Method 1

the oxide semiconductor transistor may be light-sensitive according to a material of the oxide semiconductor which is used as the channel layer... a threshold voltage and a drain current change according to a wavelength or an amount of an incident light

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS9576992B2Light-sensing apparatuses, methods of driving the light-sensing apparatuses, and optical touch screen apparatuses including the light-sensing apparatuses
Publication Date: 2017.02.21 SAMSUNG ELECTRONICS CO LTD
  • US9576992B2 patent drawing
  • US9576992B2 patent drawing
  • US9576992B2 patent drawing

AI summary

Light-sensing apparatuses may include a light sensor transistor and a switching transistor in a light-sensing pixel, the transistors being oxide semiconductor transistors. In the light-sensing apparatus, the light sensor transistor and the switching transistor in the light-sensing pixel may be adjacently formed on one substrate, the switching transistor including a channel material that is relatively less light-sensitive than the light sensor transistor and is stable, and the light sensor transistor includes a channel material that is relatively light-sensitive. The light sensor transistor may include a transparent upper electrode on a surface of a channel, and a negative voltage may be applied to the transparent upper electrode, whereby a threshold voltage shift in a negative voltage direction may be prevented or reduced.