Oxide Semiconductor Memory Device Reducing Parasitic Resistance

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Solution Overview

Problem

Current DRAM memory devices face challenges in increasing memory capacity per unit area while maintaining data retention and reducing error incidence due to high parasitic resistances and capacitances in bit and word lines, leading to increased power consumption and operational errors.

Innovation Solution

The solution involves a memory device design with oxide semiconductor transistors and capacitors, where bit and word line driver circuits are stacked and connected through wirings with strategically placed connection points on the edges between memory cell arrays, reducing parasitic resistances and capacitances, and using amplifying elements to enhance signal processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If the area of the capacitor is reduced to increase memory capacity per unit area, then the memory capacity per unit area is improved, but the capacitance value decreases resulting in smaller difference between charge amounts and shorter holding period

Engineering Contradiction:
Improvememory capacity per unit areaVSAvoidholding period
Core Design Contradiction:
Area of moving objectVSDuration of action of moving object

Solution Approach 1:

The patent changes the material parameter of the transistor from conventional semiconductor to oxide semiconductor, which fundamentally alters the off-state current characteristic. This parameter change enables the transistor to maintain extremely low leakage current even when the capacitor area is reduced, thus preserving the holding period while achieving higher memory capacity per unit area.

Inventive Principle:
Principle #35Parameter changes

2Quantity of substance

If the number of memory cells is increased to achieve large storage capacity, then the storage capacity is improved, but the parasitic capacitance and parasitic resistance of the bit line increase making it difficult to accurately read data

Engineering Contradiction:
Improvestorage capacityVSAvoiddata reading accuracy
Core Design Contradiction:
Quantity of substanceVSMeasurement precision

Solution Approach 1:

The patent changes the transistor material to oxide semiconductor, which dramatically reduces the off-state current. This parameter change allows for larger memory arrays to be constructed without the parasitic effects overwhelming the signal, as the lower leakage current maintains better signal integrity even with increased parasitic capacitance and resistance.

Inventive Principle:
Principle #35Parameter changes

3Quantity of substance

If the number of memory cells is increased to achieve large storage capacity, then the storage capacity is improved, but the parasitic resistance of the word line increases causing signal delay and potential drop leading to operational errors

Engineering Contradiction:
Improvestorage capacityVSAvoidoperational accuracy
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent changes the transistor material to oxide semiconductor, which fundamentally reduces the off-state current parameter. This enables larger memory arrays to be constructed where the reduced leakage current compensates for the increased parasitic resistance in word lines, maintaining signal integrity and operational reliability even with extended word line lengths.

Inventive Principle:
Principle #35Parameter changes

4Ease of manufacture

If conventional semiconductor transistors are used in memory cells, then the structure is simple and manufacturing is easier, but the off-state current is high requiring frequent refresh operations and increasing power consumption

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidpower consumption
Core Design Contradiction:
Ease of manufactureVSUse of energy by moving object

Solution Approach 1:

The patent changes the semiconductor material parameter from conventional silicon-based semiconductor to oxide semiconductor. This material parameter change fundamentally alters the electrical characteristics, producing extremely low off-state current that reduces refresh frequency requirements and power consumption, while still being compatible with existing thin-film fabrication processes.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS9076505B2Memory device
Publication Date: 2015.07.07 SEMICON ENERGY LAB CO LTD
  • US9076505B2 patent drawing
  • US9076505B2 patent drawing
  • US9076505B2 patent drawing

AI summary

A memory device including first to fourth memory cell arrays and a driver circuit including a pair of bit line driver circuits and a pair of word line driver circuits is provided. The first to fourth memory cell arrays are overlap with the driver circuit. Each of the pair of bit line driver circuits and a plurality of bit lines are connected through connection points on an edge along the boundary between the first and second memory cell arrays or on an edge along the boundary between the third and fourth memory cell arrays. Each of the pair of word line driver circuits and a plurality of word lines are connected through second connection points on an edge along the boundary between the first and fourth memory cell arrays or on an edge along the boundary between the second and third memory cell arrays.