Oxide TFT Display Barrier Structure Against Moisture Ingress
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Solution Overview
Problem
The reliability of display devices using transistors with oxide semiconductors is compromised due to moisture entering the oxide semiconductor, causing fluctuations in transistor properties and deteriorating display quality.
Innovation Solution
A display device configuration that includes a first inorganic layer covering the organic resin layer at 85% or more of the pixel area, with openings for moisture release, and a second inorganic layer closing these openings to prevent further moisture ingress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If an organic resin layer is used to planarize the substrate surface, then surface flatness is improved, but moisture enters the oxide semiconductor layer causing reliability deterioration
Solution Approach 1:
The protective structure is divided into multiple inorganic layers (first inorganic layer, second inorganic layer, third inorganic layer) stacked in sequence. Each layer serves as a distinct barrier component, collectively providing comprehensive moisture protection while allowing the organic resin layer to maintain its planarization function.
Solution Approach 2:
The inorganic layers act as intermediary barrier structures between the organic resin layer and the oxide semiconductor layer. These intermediate inorganic layers prevent direct moisture transmission from the organic resin to the sensitive oxide semiconductor, mediating the interaction between these two layers.
2Reliability
If the inorganic layer coverage is increased to block moisture, then reliability is improved, but manufacturing complexity increases
Solution Approach 1:
The inorganic layers are selectively formed only in regions where moisture protection is most critical - specifically above the transistor structure containing the oxide semiconductor layer. The coverage is optimized to provide adequate protection (85-95% coverage) rather than complete full-area coverage, reducing unnecessary manufacturing complexity.
Solution Approach 2:
The protective structure combines multiple inorganic materials (such as silicon oxide, silicon nitride, aluminum oxide) in a stacked configuration. This composite inorganic layer structure provides enhanced moisture barrier properties through the synergistic effect of different materials with complementary barrier characteristics.
Data Source
AI summary
A display device having a plurality of pixels arranged in a matrix along a first direction and a second direction intersecting the first direction, each of the plurality of pixels includes, a transistor including an oxide semiconductor layer, a gate wiring extending in the first direction opposite the oxide semiconductor layer, and a gate insulating layer between the oxide semiconductor layer and the gate wiring, a first conductive layer provided on at least one first insulating layer above the transistor and in contact with the oxide semiconductor layer, a second insulating layer provided on the first conductive layer, a first inorganic layer provided on the second insulating layer and having openings therein, and a second inorganic layer provided on the first inorganic layer and in contact with the second insulating layer in the opening.