Parallel Grabbing Face Fabrication for TEM Sample Handling
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Solution Overview
Problem
Existing methods for grabbing and transferring small samples using charged particle beam apparatuses often result in attitude changes and angular shifts due to the shape of the grabbing member, making it difficult to maintain the desired orientation and position of the sample during transfer.
Innovation Solution
The method involves fabricating the grabbing face of the sample carrying mechanism parallel to the charged particle beam axis by etching, allowing the sample to be grabbed and transferred in the same direction as the beam, reducing attitude changes and incorporating an angle adjustment mechanism for precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a conventional grabbing member with a non-parallel front end is used, then the sample can be grabbed, but the attitude and angle of the sample change during transfer
Solution Approach 1:
The patent changes the geometric parameter of the grabbing member's front end, specifically making it parallel to the beam irradiating axis. This parameter change ensures that when the sample is grabbed and transferred, its attitude and angle remain constant, resolving the contradiction between easy grabbing and precise attitude control.
2Device complexity
If the grabbing member front end is not aligned with the beam axis, then the mechanism is simpler, but additional attitude correction mechanisms are required
Solution Approach 1:
The patent extracts the attitude correction function from separate correction mechanisms and integrates it into the grabbing member's front end geometry. By making the front end parallel to the beam axis, the grabbing member itself performs the attitude correction, eliminating the need for additional complex correction mechanisms.
3Ease of manufacture
If the grabbing face is not fabricated parallel to the beam axis, then the fabrication process is simpler, but dust and debris remain on the grabbing portion
Solution Approach 1:
The patent applies preliminary action by fabricating the grabbing face parallel to the beam axis before the grabbing operation. This preliminary geometric configuration enables the charged particle beam to effectively remove dust and debris from the grabbing portion, preventing contamination before it affects sample handling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables accurate and stable transfer of small samples without altering their attitude, ensuring precise positioning and reducing the need for additional attitude correction mechanisms, while also removing dust and debris from the grabbing portion.
Implementation Method 1
a face of the small sample and a grabbing face of a grabbing portion are made parallel in a state in which an attitude of the small sample is rectified by working by a charged particle beam in the same direction
Implementation Method 2
an image is provided by scanning a charged particle beam, an accuracy of working the grabbing face can be confirmed
Data Source
AI summary
By working a grabbing portion by a charged particle beam of FIB or the like, the grabbing portion in parallel with the beam can be formed, and also dust adhered to the grabbing portion is removed. When a small sample represented by a TEM sample is fabricated by being cut out by etching by a charged particle beam and is carried at inside of an apparatus of irradiating a charged particle beam, the sample is etched in a direction of irradiating the charged particle beam, and therefore, a mechanism pinched by a grabbing face of a grabbing portion can be worked in a direction the same as that in working the sample, and therefore, a change in an attitude can be reduced when the sample and the grabbing face are fabricated by parallel faces.