Optical Particle Analyzer Self-Calibration via Laser Modulation

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Solution Overview

Problem

Optical particle analyzers require complex and costly calibration processes, often necessitating trained personnel and specialized equipment, which can lead to mis-calibration and undetected contamination issues in clean areas, particularly in industries like semiconductors and pharmaceuticals, resulting in yield drops and product recalls.

Innovation Solution

A self-diagnostic system for optical particle analyzers that uses laser power modulation and time domain frequencies to verify calibration status and component health without the need for actual particles, allowing for reliable calibration verification independent of particle presence and reducing the interference from residual particles.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a full calibration process is performed using certified particle size standards and reference particle analyzers, then measurement precision is improved, but device complexity and ease of operation deteriorate due to requiring trained personnel and specialized equipment

Engineering Contradiction:
Improvecalibration accuracyVSAvoidcalibration process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The optical particle analyzer performs self-calibration by generating test particles internally using a particle generation system that aerosolizes monodisperse spherical particles from a liquid suspension, eliminating the need for external calibration equipment and trained personnel while maintaining calibration accuracy

Inventive Principle:
Principle #25Self-service

2Loss of time

If calibration is performed annually as recommended, then loss of time is reduced, but reliability deteriorates as the analyzer may drift out of calibration between calibration cycles

Engineering Contradiction:
Improvecalibration frequencyVSAvoidcalibration status maintenance
Core Design Contradiction:
Loss of timeVSReliability

Solution Approach 1:

The system performs continuous or periodic self-calibration operations between annual calibrations by automatically generating test particles and verifying measurement accuracy, ensuring the analyzer remains in calibration status throughout the year rather than allowing drift to occur

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The particle generation system provides real-time feedback on measurement accuracy by comparing measured particle sizes against known standard sizes, allowing the system to detect and correct calibration drift before it affects actual measurements

Inventive Principle:
Principle #23Feedback

3Measurement precision

If laser power is increased to improve signal detection, then measurement precision is improved, but object-generated harmful factors worsen due to increased false counts from scattered light

Engineering Contradiction:
Improvesignal detection capabilityVSAvoidfalse count rate
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The system dynamically adjusts laser power levels based on detected particle concentration and signal quality, optimizing the balance between signal strength and false count rate rather than using a fixed high power level

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enables accurate and efficient calibration verification, reducing the risk of mis-calibration, minimizing downtime, and preventing contamination-related issues by allowing for real-time monitoring and maintenance, thus ensuring consistent product quality and reducing financial losses.

Implementation Method 1

a laser for generating a laser beam

Methodology Applied
Scientific EffectLaser: Laser

Implementation Method 2

an optical assembly in optical communication with the laser for directing the laser beam from the laser to the flow chamber

Methodology Applied
Scientific EffectOptical direction: Lens

Implementation Method 3

a detector for detecting scattered radiation from the laser beam

Methodology Applied
Scientific EffectLight scattering: Scattering

Implementation Method 4

an optical collection system for directing scattered radiation from the laser beam from the flow chamber and to the detector

Methodology Applied
Scientific EffectOptical collection: Lens

Implementation Method 5

a detector for detecting scattered radiation from the laser beam

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentEP3861317B1Calibration verification for optical particle analyzers
Publication Date: 2023.08.16 PARTICLE MEASURING SYSTEMS INC
  • EP3861317B1 patent drawingFigure 1
  • EP3861317B1 patent drawingFigure 2
  • EP3861317B1 patent drawingFigure 3

AI summary

Provided are particle analyzers and related methods for verifying calibration status of the particle analyzer, including independently of the presence or absence of particles. The method and analyzers include use of distinct and non-interfering time frequency domains: a middle frequency time domain and a low frequency time domain, and optionally a high frequency time domain. The high frequency time domain generates a laser facet drive current frequency modulation to prevent the laser facet from spatial-mode hopping. The middle frequency time domain is for particle detection. The low frequency time domain is for calibration status, including laser-pulse-light self-diagnostics, for the health or calibration status of the analyzer. By carefully selecting the frequency time domain ranges, there is non-interference, with the ability to self-diagnose the instrument that is particle-independent.