Particle Beam Device Coordinate Transformation for Local Displacement Compensation
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Solution Overview
Problem
Particle beam devices face challenges in accurately positioning and guiding beams to specific areas on an object's surface due to mechanical errors and local displacements caused by changes in beam parameters, leading to potential analysis or processing of incorrect areas.
Innovation Solution
A method and particle beam device that utilize a control unit to identify and adjust for local displacements by correlating object coordinates with holder coordinates, using distinctive features identifiable across different operation modes, and applying coordinate transformations to ensure precise positioning and beam guidance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If beam parameters are changed to enable different operation modes, then the particle beam device can perform multiple functions (analysis and processing), but local displacements occur causing the beam to target incorrect areas
Solution Approach 1:
The patent applies preliminary action by identifying and storing the position of a distinctive feature in the first operation mode before switching to the second operation mode. This pre-identified position serves as a reference point that allows the system to compensate for local displacements that occur during mode switching, ensuring accurate beam targeting in both modes
Solution Approach 2:
The patent implements feedback by comparing the stored position of the distinctive feature from the first operation mode with its actual position after switching to the second operation mode. Based on this comparison, the system calculates a local displacement and adjusts subsequent beam positioning accordingly, creating a closed-loop control system that maintains precision across different operation modes
2Ease of operation
If mechanical positioning is used to locate specific areas on the object surface, then the object holder can be moved to desired positions, but mechanical errors cause positioning inaccuracies
Solution Approach 1:
The patent replaces purely mechanical positioning with a hybrid approach that combines mechanical movement with optical/electronic identification. Instead of relying solely on mechanical coordinate systems and movement precision, the system uses a detector to identify distinctive features and determine their actual positions, substituting mechanical precision requirements with detection and computational methods
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate analysis and processing of specific areas on an object's surface even when beam parameters change, preventing incorrect targeting and ensuring precise alignment and operation across varying modes.
Implementation Method 1
an electron beam device, in particular a scanning electron microscope (also known as SEM) or a transmission electron microscope (also known as TEM)... an electron beam (hereinafter also called primary electron beam) is generated using a beam generator
Implementation Method 2
The electrons of the primary electron beam are accelerated to a predeterminable energy and focused by a beam guiding system, in particular an objective lens, onto a sample to be analyzed
Implementation Method 3
In particular, interaction particles and/or interaction radiation arise(s) as a consequence of the interaction. By way of example, electrons are emitted by the sample to be analyzed (so-called secondary electrons)
Implementation Method 4
Using a deflection unit, the primary electron beam is guided in a raster-type fashion over a surface of the sample to be analyzed
Data Source
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AI summary
The application relates to a method for analyzing, in particular for imaging, and/or processing of an object as well as a particle beam device (200) for carrying out this method. The method in particular comprises a control unit (103 providing a first control parameter, wherein a beam guiding unit (202, 203, 204, 208, 209) is controlled using the first control parameter for guiding the particle beam (217) and/or wherein a moving unit is controlled using the first control parameter for moving an object holder (210), correlating a position of the object holder (210) in a second coordinate system to the object position on the surface of the object, identifying a first coordinate transformation between the first coordinate system and the second coordinate system, identifying an orientation position of a distinctive feature on the surface of the object and identifying first coordinates of the orientation position in the first coordinate system, the control unit (103) providing a second control parameter, wherein the second control parameter is used for at least one of: controlling the beam guiding unit (202, 203, 204, 208, 209) for guiding the particle beam (217), controlling the moving unit for moving the object holder (210) or controlling a detector (212, 213), identifying again the orientation position of the distinctive feature and identifying second coordinates of the orientation position in the first coordinate system, comparing the first coordinates with the second coordinates, identifying a local displacement of the first coordinates to the second coordinates, identifying a second coordinate transformation using the first coordinate transformation and the local displacement and identifying a position of an area to be analyzed and/or processed on the surface of the object. The method further comprises operating the particle beam device (200) using a first detector (212) or a second detector (213).