Particle Beam System Multi-Aperture Segmentation and Trajectory Filtering
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Solution Overview
Problem
Existing multiple beam particle beam systems face challenges in enhancing contrast production and obtaining detailed topography and material information of objects, particularly in scanning electron microscopy, due to limitations in focusing and filtering techniques.
Innovation Solution
A particle beam system that includes a particle source, multiple beam producer, objective lenses, detector system with independent detection fields, and a filter device capable of filtering interaction products based on their trajectories, allowing for improved contrast and topography imaging by projecting interaction products onto specific detection regions and filtering them according to their kinetic energy or trajectory.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a multi-aperture plate is used to produce multiple electron beams, then productivity is improved through parallel scanning, but device complexity increases due to the need for precise aperture positioning and beam separation
Solution Approach 1:
The patent divides a single electron beam into multiple parallel beams by passing it through a multi-aperture plate, enabling parallel scanning of the object surface. This segmentation approach increases productivity without requiring multiple independent electron sources, thus managing device complexity effectively
Solution Approach 2:
The multi-aperture plate acts as an intermediary component that transforms one beam into multiple beams. This mediator enables beam multiplication and spatial separation, resolving the contradiction between productivity improvement and device complexity by providing a straightforward mechanical solution
2Device complexity
If interaction products from different regions are projected onto the same detection region, then device complexity is reduced, but measurement precision deteriorates due to signal mixing
Solution Approach 1:
The patent employs a projective system with multiple detection regions arranged in a specific geometric configuration, where interaction products from different object regions are projected onto different detection regions. This spatial dimensionality separation ensures that signals from different locations remain distinct, maintaining measurement precision while managing detector complexity through systematic arrangement
3Measurement precision
If a filter device is added to filter interaction products by trajectory, then measurement precision is improved for topography imaging, but device complexity increases
Solution Approach 1:
The patent implements filtering with specific detection regions that are optimized for detecting interaction products with particular trajectories. Rather than filtering all beams uniformly, the system applies localized filtering characteristics to different regions, improving topography contrast while managing overall system complexity through region-specific optimization
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves enhanced contrast and topography imaging by independently detecting and filtering interaction products, enabling better focus adjustment, material composition analysis, and voltage contrast production, thereby improving the accuracy of object surface imaging.
Implementation Method 1
a particle source, configured to produce a first beam of charged particles
Implementation Method 2
a particle source, configured to produce a first beam of charged particles
Implementation Method 3
an objective, configured to focus incident partial beams in a first plane
Implementation Method 4
an objective, configured to focus incident partial beams in a first plane
Implementation Method 5
a filter device for filtering the interaction products in accordance with their respective trajectory
Implementation Method 6
a detector system including a plurality of detection regions
Data Source
AI summary
A particle beam system includes a particle source to produce a first beam of charged particles. The particle beam system also includes a multiple beam producer to produce a plurality of partial beams from a first incident beam of charged particles. The partial beams are spaced apart spatially in a direction perpendicular to a propagation direction of the partial beams. The plurality of partial beams includes at least a first partial beam and a second partial beam. The particle beam system further includes an objective to focus incident partial beams in a first plane so that a first region, on which the first partial beam is incident in the first plane, is separated from a second region, on which a second partial beam is incident. The particle beam system also a detector system including a plurality of detection regions and a projective system.