Particle Beam Component Positioning via Contact Measurement
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Solution Overview
Problem
Existing particle beam devices, such as electron and ion beam systems, face challenges in accurately positioning components like gas feeding devices due to the lack of a reproducible method, leading to inefficient material deposition and imaging issues.
Innovation Solution
A method and system for determining the distance between a component of a particle beam device and an object, allowing for precise positioning by moving the component towards the object until contact is made, using resistance measurements or visual observation, and adjusting the position to ensure optimal alignment along desired axes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a needle-shaped gas feeding device is arranged close to the object surface for accurate material deposition, then deposition precision is improved, but positioning reproducibility deteriorates due to lack of reliable alignment method
Solution Approach 1:
The patent replaces manual mechanical positioning with an automated optical measurement system. A laser distance meter is used to automatically measure the distance between the gas feeding device and the object surface, eliminating the need for manual alignment and enabling precise, reproducible positioning at distances of a few micrometers.
Solution Approach 2:
The system enables self-positioning of the gas feeding device through automated feedback control. The distance measurement system continuously monitors the gap between the needle-shaped device and the object surface, and the system automatically adjusts the position to maintain the desired spacing, allowing the device to self-correct without manual intervention.
2Manufacturing precision
If trial and error method is used for positioning the gas feeding device, then positioning can be achieved, but time consumption increases and positioning accuracy deteriorates
Solution Approach 1:
The patent replaces the trial-and-error mechanical adjustment process with an automated optical measurement and control system. The laser distance meter provides real-time distance feedback, enabling the system to directly calculate and achieve the target position without repeated manual adjustments, thereby dramatically reducing positioning time while improving accuracy.
Solution Approach 2:
The system implements a feedback control mechanism where the laser distance meter continuously measures the actual distance between the gas feeding device and the object surface. This measurement is fed back to the control system, which compares it with the target distance and automatically adjusts the device position until the desired spacing is achieved, eliminating trial-and-error approaches.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and reproducible positioning of components, improving material deposition and imaging quality by ensuring precise alignment and contact between the component and the object, thereby enhancing the overall performance of particle beam devices.
Implementation Method 1
The electrons of the primary electron beam thereby interact with the object to be examined. As a consequence of the interaction, in particular electrons are emitted from the object (known as secondary electrons)
Implementation Method 2
electrons of the primary electron beam are backscattered (known as backscattered electrons)
Implementation Method 3
The primary electron beam radiates through the object to be examined. During the passage of the primary electron beam through the object to be examined, the electrons of the primary electron beam interact with the material of the object to be examined.
Implementation Method 4
By interaction of the ion beam with the gaseous preliminary substance, a layer of a substance is deposited on the surface of the object
Data Source
AI summary
The system described herein determines a distance of a component of a particle beam device from an object to the particle beam device and sets a position of the component in the particle beam device. The component is moved from a first starting position of the component relatively in the direction of an object, which is located in a second starting position, until the component makes contact with the object. When the component makes contact with the object, an adjusting path covered by the component and/or the object during the movement is determined. The adjusting path runs along a straight line that joins a first point on the component in the first starting position to a second point on the object in the second starting position that is arranged closest to the first point on the component along this line. The adjusting path corresponds to the distance.