Particle Beam Scan Region Rotation Dynamics
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Solution Overview
Problem
Existing methods for producing TEM lamellas are complex due to the need for precise alignment and rotation of scan regions to achieve uniform thickness and parallel alignment with the target region, which complicates the ablation process and can result in the scan region leaving the observation area.
Innovation Solution
A method where the point of rotation and axis of rotation are dynamically selected based on the direction of rotation and the progress of the particle beam, allowing for a change in scanning direction without predetermining their location, ensuring the scan region remains aligned with the target region and maintains uniform thickness during ablation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the scan region is rotated and aligned parallel to the target region using predetermined fixed axes, then the TEM lamella achieves uniform thickness and parallel alignment, but the process becomes complex and the scan region may leave the observation area
Solution Approach 1:
The patent applies dynamics by making the point of rotation and axis of rotation variable rather than fixed. The control unit dynamically determines the point of rotation and axis of rotation based on the current scan position and desired rotation angle, allowing the scanning system to adapt its rotation parameters in real-time during the ablation process, thereby simplifying the overall alignment procedure while maintaining precision
Solution Approach 2:
The patent changes the parameters of the rotation system by allowing the point of rotation and axis of rotation to be dynamically adjusted based on scan position and rotation angle. This parameter change enables the system to achieve parallel alignment of the scan region with the target region without requiring complex predetermined fixed axes, thereby reducing process complexity while maintaining manufacturing precision
2Reliability
If the scan region is rotated using fixed predetermined axes, then alignment is achieved, but the scan region may leave the observation area
Solution Approach 1:
The system dynamically adjusts the point of rotation and axis of rotation based on the current scan position and desired rotation angle. This dynamic adaptation ensures that the scan region remains properly positioned within the observation area during rotation, preventing it from leaving the observable field while maintaining accurate alignment with the target region
Solution Approach 2:
The control unit uses feedback from the current scan position and rotation angle to dynamically determine the appropriate point of rotation and axis of rotation. This feedback mechanism ensures that the scan region remains within the observation area during rotation by continuously adjusting rotation parameters based on real-time system state
3Manufacturing precision
If complex alignment procedures are used to achieve parallel alignment, then uniform thickness is obtained, but the production process becomes time-consuming
Solution Approach 1:
The dynamic determination of point of rotation and axis of rotation based on current scan position and desired rotation angle eliminates the need for complex predetermined alignment procedures. The system can achieve parallel alignment of the scan region with the target region more quickly by adapting rotation parameters in real-time, thereby improving production speed while maintaining manufacturing precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the production of TEM lamellas by allowing for a more straightforward alignment and rotation of the scan region, ensuring uniform thickness and preventing damage, while maintaining the scan region within the observation area.
Implementation Method 1
the primary electron beam electrons interact with the material of the sample to be examined. Interaction particles, in particular, are generated as a result of the interaction
Implementation Method 2
primary electron beam electrons (so-called backscattered electrons) are scattered back
Implementation Method 3
the ion beam is used to ablate regions of the sample arranged around the target region such that the TEM lamella, which then comprises the target region, is exposed
Data Source
AI summary
A method is provided for processing and/or observing an object using at least one particle beam that is scanned over the object. A scan region on the object is determined, the scan region having scan lines, and the particle beam is moved in a first scanning direction along one of the scan lines. The first scanning direction is changed to a second scanning direction at a change-of-direction time. Changing from the first scanning direction to the second scanning direction comprises setting of a point of rotation in that scan line of the scan region in which the particle beam is situated at the change-of-direction time, with an axis of rotation extending through the point of rotation. The first scanning direction is changed into the second scanning direction by rotating the scan region about the axis of rotation, with the point of rotation being selected dependent on the direction of rotation.