Particle Size Detection Using Orthogonal Polarized Laser Beams

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Solution Overview

Problem

Conventional methods for detecting particle size in fluids lack accuracy and precision, making it difficult to distinguish between small and large particles due to similar light scattering patterns from particles passing through different regions of a laser beam.

Innovation Solution

A system and method using two laser beams with orthogonal polarizations, where the first laser beam and second laser beam are separated by a distance, allowing for the classification of particle size based on the intensity of p-polarized and s-polarized illumination of scattered light, enabling more accurate size determination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single laser beam is used for particle detection, then the device complexity is low, but the measurement precision is insufficient due to inability to distinguish particle size

Engineering Contradiction:
Improveparticle size determination accuracyVSAvoidlaser beam configuration
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The single laser beam is segmented into multiple beams with different polarizations (p-polarized and s-polarized beams) that pass through the particle at different positions. This segmentation allows the system to obtain multiple scattering signals from different regions of the particle, enabling accurate size determination while maintaining relatively simple device configuration.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention changes the polarization parameter of the laser beams to create p-polarized and s-polarized beams. By varying the polarization state and using beams with different polarization orientations, the system can distinguish particle size more accurately. The different polarization parameters provide complementary information about particle properties that cannot be obtained with a single beam.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If multiple laser beams with different polarizations are used, then the measurement precision improves, but the device complexity increases

Engineering Contradiction:
Improveparticle size classification accuracyVSAvoidoptical system configuration
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The optical system is segmented into multiple independent laser beams (p-polarized beam and s-polarized beam) that can be configured separately. Each beam interacts with the particle at different positions and provides distinct scattering information. This segmentation allows for precise particle size measurement while keeping each individual beam component relatively simple.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The multiple laser beams serve universal functions in the detection system. Both p-polarized and s-polarized beams work together to provide comprehensive particle characterization. The system uses the same detection apparatus to measure scattering from different polarization beams, making the detection system multi-functional without requiring completely separate measurement systems.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach provides greater accuracy in determining particle size by analyzing the intensity of p-polarized and s-polarized illumination, effectively distinguishing between smaller, medium-sized, and larger particles.

Implementation Method 1

A particle moving through a fluid is illuminated by a pair of laser beams... light scattering patterns from particles passing through different regions

Methodology Applied
Scientific EffectLight scattering: Scattering

Implementation Method 2

A first imaging device includes a lens and a digital detector... light that passes through the lens of an imaging device

Methodology Applied
Scientific EffectLens focusing: Lens

Implementation Method 3

The digital detector is configured to accumulate a metric of an intensity of an accumulated light

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Implementation Method 4

two laser beams with orthogonal polarizations, where the first laser beam and second laser beam are separated by a distance, allowing for the classification of particle size based on the intensity of p-polarized and s-polarized illumination

Methodology Applied
Scientific EffectLight polarization: Polarisation

Data Source

PatentUS11441992B2Method and apparatus for detection of particle size in a fluid
Publication Date: 2022.09.13 APPLIED MATERIALS INC
  • US11441992B2 patent drawing
  • US11441992B2 patent drawing
  • US11441992B2 patent drawing

AI summary

Examples disclosed herein generally relate to systems and methods for detecting the size of a particle in a fluid. In one example, a system for imaging a particle includes a first imaging device. The first imaging device includes a lens and a digital detector. The system further includes a laser source. He laser source is configured to emit a first laser beam and a second laser beam. The digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens. The accumulated light is scattered from the particle. The accumulated light includes light from the first laser beam and the second laser beam.