Charged Particle Source Frame Layout for Alignment Stability
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Solution Overview
Problem
Existing charged particle sources face challenges in maintaining accurate alignment of components and are cumbersome to connect to power supplies, which can disrupt the alignment and lead to mechanical stress.
Innovation Solution
A charged particle source module with a frame structure that includes a first and second rigid frame part and rigid support members, where the charged particle source arrangement is mounted on the second frame part and the power connecting assembly is on the first frame part, allowing for electrical connection via wiring. This design provides a strain-relieving arrangement that maintains component alignment by transferring forces away from the charged particle source.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the power connecting assembly is directly connected to the charged particle source arrangement, then electrical connection is simplified, but mechanical stress and alignment disruption occur
Solution Approach 1:
The system is divided into two separate frame parts: the first frame part carries the power connecting assembly while the second frame part carries the charged particle source arrangement. This segmentation isolates the power connection operations from the sensitive source components, allowing independent handling of electrical connection without compromising alignment precision.
Solution Approach 2:
The rigid support members act as intermediaries that rigidly connect the first and second frame parts while transmitting mechanical forces away from the charged particle source arrangement. This intermediary structure provides a stable force transmission path that protects the source alignment from power connection stresses.
2Stability of the object's composition
If the power connecting assembly is rigidly connected to the charged particle source arrangement, then structural stability is improved, but external forces during connection disrupt component alignment
Solution Approach 1:
By separating the power connecting assembly and charged particle source arrangement onto different frame parts, the patent creates independent stable platforms. Each component maintains its own stable mounting environment while the rigid support members provide overall structural integrity without force coupling.
Solution Approach 2:
The power connecting assembly is extracted from the immediate vicinity of the charged particle source arrangement and placed on a separate first frame part. This extraction removes the source of mechanical stress from proximity to the sensitive components, eliminating the risk of alignment disruption during power connection operations.
3Volume of moving object
If the charged particle source components are closely integrated, then device compactness is achieved, but connection operations cause mechanical stress and misalignment
Solution Approach 1:
The compact design is achieved through integrated frame structure with rigid support members, while operational safety is maintained by segmenting the power connection and source components onto separate frame parts. This allows the overall device to remain compact while providing operational independence for connection procedures.
Solution Approach 2:
The rigid support members serve as intermediaries that maintain fixed spatial relationships between the first and second frame parts, ensuring compact integration while providing a stable force transmission path that isolates the source arrangement from connection-related mechanical stresses.
Data Source
AI summary
The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.