Patterned Metal Film Composition Using Low-Energy Plasma

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Solution Overview

Problem

Existing fabrication techniques for forming metal electrodes in organic electronic devices, such as PVD and CVD, damage organic materials and are costly due to expensive ink compositions, limiting the cost-efficiency and functionality of organic electronic devices.

Innovation Solution

A low-energy plasma-based process using an ink composition to form patterned metal films on substrates, which includes exposing the substrate to low-energy RF plasma or atmospheric plasma to create thin metal films without damaging the substrate, allowing for cost-effective mass production of electronic devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If PVD technique is used to form metal electrodes, then metal films can be deposited on substrates, but the high-energy metal atoms damage the organic substrate materials

Engineering Contradiction:
Improvemetal film formationVSAvoidsubstrate damage
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the physical vapor deposition (PVD) mechanical/physical process with a chemical solution-based printing process. Instead of using high-energy metal atoms that bombard and damage the substrate, the invention uses liquid ink formulations containing metal precursors that are deposited and then converted to metal through low-energy plasma treatment or thermal processing, thereby eliminating the mechanical damage while achieving the same metal film formation function.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the energy parameters of the deposition process from high-energy physical vapor deposition to low-energy chemical conversion. The metal is introduced in a low-energy liquid state and converted to metallic form through controlled plasma or thermal treatment, dramatically reducing the energy input and preventing substrate damage while maintaining film formation capability.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If CVD technique is used to form metal electrodes, then metal films can be deposited on substrates, but the highly reactive and aggressive reagents damage the organic substrates

Engineering Contradiction:
Improvemetal film formationVSAvoidsubstrate damage
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the chemical vapor deposition (CVD) process using highly reactive gaseous reagents with a solution-based printing process followed by low-energy plasma or thermal conversion. This substitution eliminates the need for aggressive chemical reagents that would attack and damage organic substrates, while still achieving complete metal film formation through the controlled conversion of metal precursors in the printed ink.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If existing ink-based printing processes are used, then metal films can be formed on substrates, but the manufacturing cost is very expensive due to multiple processing steps

Engineering Contradiction:
Improvemetal film formationVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent combines multiple separate manufacturing steps into a single integrated printing and conversion process. The ink formulation contains all necessary metal precursors and additives in one solution that is printed directly onto the substrate, and the subsequent plasma or thermal treatment simultaneously completes the metal formation, eliminating the need for separate synthesis, purification, and processing steps that drive up costs in conventional methods.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent employs a disposable ink formulation that can be directly printed and converted without requiring expensive, complex purification and processing infrastructure. The ink is designed to be applied in a single step and converted to metal in situ, replacing expensive, multi-step manufacturing processes with a simpler, more cost-effective approach that uses readily available materials and equipment.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

4Manufacturing precision

If existing ink solutions are used in printing processes, then metal films can be formed, but heating of the solution is required which increases processing complexity

Engineering Contradiction:
Improvemetal film formationVSAvoidprocessing complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces thermal processing with plasma-based conversion. Instead of heating the ink solution to high temperatures to form metal films, the invention uses plasma treatment that converts the metal precursors at lower temperatures, eliminating the need for complex heating systems and reducing processing complexity while maintaining effective metal film formation.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the formation of patterned metal films on various substrates without substrate damage, facilitating low-cost and efficient manufacturing of electronic devices like RFID tags, sensors, and flexible displays.

Implementation Method 1

The process for forming the metal films may be any fabrication, manufacturing, and/or printing process. The disclosed process is based, in part, on exposing a substrate having portions thereof coated with the ink composition to plasma for a predefined period of time.

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

The PVD process is typically used in the manufacture of items which require thin films for mechanical, chemical or electronic reasons.

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentEP3209734B1Composition for forming a patterned metal film on a substrate
Publication Date: 2025.09.24 ORELTECH
  • EP3209734B1 patent drawingFigure 1a~1c
  • EP3209734B1 patent drawingFigure 1d~1e
  • EP3209734B1 patent drawingFigure 2

AI summary

A composition for forming a patterned thin metal film on a substrate is presented. The composition includes metal cations; and at least one solvent, wherein the patterned thin metal film is adhered to a surface of the substrate upon exposure of the at least metal cations to a low-energy plasma.