Patterned X-Ray Target Structure for Beam Shaping and Heat Dissipation
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Solution Overview
Problem
Existing patterned X-ray emitting targets and X-ray sources face limitations in efficiency and versatility, particularly in XRS, XPS, and XRF systems, where the current technologies struggle to optimize X-ray emission and beam shaping for various applications.
Innovation Solution
A patterned X-ray target comprising a gold mask with apertures, an underlying aluminum or alternative active layer, a diamond substrate with intermediate layers for improved bonding, and a heat sink, which allows for customizable X-ray emission patterns and enhanced thermal management, enabling efficient X-ray generation and beam shaping for different analytical techniques.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a patterned X-ray target is used to achieve customizable X-ray emission patterns, then beam shaping capability is improved, but device complexity increases due to multiple layers including gold mask, active layer, intermediate layers, and diamond substrate
Solution Approach 1:
The X-ray target is divided into multiple functional layers: a gold mask layer with patterned apertures for beam shaping, an active layer for X-ray generation, intermediate layers for bonding, and a diamond substrate for thermal management. Each layer performs a specific function, allowing independent optimization of beam shaping, X-ray generation, and thermal dissipation.
Solution Approach 2:
The target employs composite material construction combining gold (for mask precision), aluminum or alternative active materials (for X-ray emission), diamond (for thermal conductivity), and intermediate bonding layers. This composite structure integrates multiple material properties to simultaneously achieve patterned emission, efficient heat dissipation, and structural stability.
2Productivity
If an active layer is added to improve X-ray emission efficiency, then X-ray generation capability is improved, but device complexity and manufacturing difficulty increase
Solution Approach 1:
Intermediate layers are introduced between the active layer and diamond substrate to facilitate bonding between dissimilar materials. These intermediary layers enable reliable attachment of the active layer to the diamond heat sink, solving the manufacturing challenge of joining materials with different thermal and mechanical properties.
3Temperature
If a diamond substrate with intermediate layers is used to improve thermal management, then heat dissipation capability is improved, but device complexity and manufacturing precision requirements increase
Solution Approach 1:
The intermediate layers are designed with specific thickness parameters (e.g., 10-100 nm) to optimize both thermal conduction and bonding performance. By controlling the thickness and material composition of these intermediary layers, the system achieves effective heat dissipation while maintaining manufacturability through standard thin-film deposition techniques.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides improved X-ray sources capable of efficient X-ray emission with customizable patterns, enhancing the performance of XRS, XPS, and XRF systems by optimizing thermal and electrical conductivity, and allowing for precise beam control and analysis.
Implementation Method 1
A patterned X-ray target comprises a patterned X-ray impermeable mask, typically formed of gold and having one or more apertures which define at least one X-ray passage window
Implementation Method 2
Underlying active layer and bonded thereto, via a plurality of intermediate layers, is a diamond substrate
Implementation Method 3
a patterned X-ray impermeable mask, typically formed of gold and having one or more apertures which define at least one X-ray passage window
Data Source
AI summary
The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.