Phase Change Memory Contact Structure via Insulator Breakdown

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Solution Overview

Problem

Traditional phase change memory cells require a steering element, increasing size, cost, complexity, and power consumption due to the need for a small contact structure, which is complicated and costly to manufacture.

Innovation Solution

A simplified phase change device structure with a contact structure formed by an insulating material breakdown process, eliminating the need for a steering element, featuring a sandwich structure of conductor/phase change material/insulator/conductor with a small contact size achieved through controlled insulator breakdown, reducing manufacturing costs and power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a traditional steering element (transistor or diode) is used in phase change memory cell, then the memory cell can function properly, but the overall size, cost, complexity and power consumption increase

Engineering Contradiction:
Improvememory cell functionalityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts and removes the steering element (transistor or diode) from the phase change memory cell structure. By eliminating this separate component, the invention achieves simpler device architecture, reduced manufacturing complexity, and lower power consumption while maintaining memory functionality through the phase change material's inherent properties

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The phase change material structure is designed to perform multiple functions simultaneously: it serves as both the memory element and the switching element. The material's ability to switch between amorphous and crystalline states provides both storage and selection functionality, eliminating the need for separate steering elements

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Area of stationary object

If a small contact structure is used at one end of the phase change device, then the overall device size decreases and switching power consumption lowers, but the manufacturing process becomes very complicated with high process cost

Engineering Contradiction:
Improvecontact structure areaVSAvoidmanufacturing process complexity
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The patent merges the contact structure formation with the phase change material deposition process. The contact structure is integrated into the sandwich structure during the same manufacturing sequence, eliminating the need for separate, complex small-contact fabrication processes while achieving reduced contact area and lower power consumption

Inventive Principle:
Principle #5Merging (Combining)

3Use of energy by moving object

If a small contact structure is used at one end of the phase change device, then the switching current and overall switching power consumption decrease, but the manufacturing process becomes very complicated with high process cost

Engineering Contradiction:
Improveswitching power consumptionVSAvoidmanufacturing process complexity
Core Design Contradiction:
Use of energy by moving objectVSEase of manufacture

Solution Approach 1:

The patent combines the contact structure formation with the phase change material deposition process. The contact structure is integrated into the sandwich structure during the same manufacturing sequence, eliminating the need for separate, complex small-contact fabrication processes while achieving reduced contact area and lower power consumption

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution results in a more power-efficient, smaller, and less costly phase change memory cell with reduced manufacturing complexity, enabling denser integration and lower power consumption while maintaining sufficient current density for state switching.

Implementation Method 1

A contact structure formed in the first insulating material between the first contact electrode structure and the phase change material is also included. The contact structure is formed by an insulating material breakdown process.

Methodology Applied
Scientific EffectInsulating material breakdown: Avalanche Breakdown

Implementation Method 2

The phase change material can be switched from one state to the other by passing an electrical current through the phase change material to cause it to change states.

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 3

The phase change material can be switched from one state to the other by passing an electrical current through the phase change material to cause it to change states.

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS8084761B2Structure for phase change memory and the method of forming same
Publication Date: 2011.12.27 MACRONIX INTERNATIONAL CO LTD
  • US8084761B2 patent drawing
  • US8084761B2 patent drawing
  • US8084761B2 patent drawing

AI summary

A phase change device includes a first contact electrode structure a phase change material and a first insulating material between the phase change material and the first contact electrode structure and a second contact electrode in contact with the phase change material. A contact structure formed in the first insulating material between the first contact electrode structure and the phase change material is also included. The contact structure is formed by an insulating material breakdown process. A method of forming a phase change device is also described.