Peak Force Tapping AFM Probe for Sensitive Electrical Mapping

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Solution Overview

Problem

Current scanning probe microscopes, particularly Kelvin Probe Force Microscopy (KPFM), face limitations in sensitivity, resolution, and the ability to simultaneously measure both mechanical and electrical properties of a sample, especially due to the use of inhomogeneous probes and high spring constants that compromise stability and accuracy.

Innovation Solution

The integration of Peak Force Tapping Mode (PFT mode) AFM with KPFM, using a homogeneous conducting tip and insulating cantilever, allows for simultaneous measurement of mechanical and electrical properties with improved sensitivity and accuracy by employing probes with lower spring constants and homogeneous materials, enabling high-resolution nanoscale characterization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If inhomogeneous probes with high spring constants are used in traditional KPFM, then the probe structure is simpler and easier to manufacture, but the sensitivity and measurement precision deteriorate

Engineering Contradiction:
ImprovesensitivityVSAvoidprobe structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The probe is divided into two distinct segments: an insulating cantilever and a homogeneous conducting tip. This segmentation allows each component to be optimized for its specific function - the insulating cantilever reduces parasitic capacitance while the homogeneous conducting tip provides stable electrical properties, thereby improving sensitivity without requiring complex integrated structures

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe uses composite construction combining insulating material for the cantilever and homogeneous conducting material for the tip. This composite approach leverages the advantages of both material types - the insulating cantilever minimizes electrical interference while the conducting tip ensures stable electrical measurements, achieving high sensitivity through material optimization rather than structural complexity

Inventive Principle:
Principle #40Composite materials

2Productivity

If traditional AFM modes are used to measure mechanical properties, then the mechanical property mapping can be obtained, but the ability to simultaneously measure electrical properties with high resolution deteriorates

Engineering Contradiction:
Improvesimultaneous measurement capabilityVSAvoidelectrical property resolution
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The system merges Peak Force Tapping Mode AFM for mechanical property measurement with Kelvin Probe Force Microscopy for electrical property measurement into a single integrated system. The homogeneous conducting tip enables both measurement modes to operate simultaneously with high resolution, as the tip's uniform electrical properties eliminate the trade-off between mechanical and electrical measurement capabilities

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The homogeneous conducting tip serves multiple functions: it enables both mechanical property mapping through Peak Force Tapping Mode and electrical property measurement through KPFM simultaneously. This multi-functionality allows the single probe to perform both measurement types with high resolution without requiring separate probes or sequential measurement procedures

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If probes with inhomogeneous materials are used, then the manufacturing process is simpler, but the repeatability and stability of electrical property measurements worsen

Engineering Contradiction:
ImproverepeatabilityVSAvoidprobe fabrication
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The tip is constructed from homogeneous conducting material throughout, ensuring uniform electrical properties from base to apex. This homogeneity provides stable and repeatable electrical measurements by eliminating variations in work function and electrical conductivity that would otherwise occur with inhomogeneous or coated tips. The simplified single-material construction actually eases manufacturing compared to multi-layer coated structures

Inventive Principle:
Principle #33Homogeneity

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables simultaneous high-resolution imaging and mechanical property mapping, enhancing sensitivity and repeatability, and providing correlated electrical and mechanical property data, overcoming limitations of traditional KPFM and AFM systems.

Implementation Method 1

employ a probe having a tip and which cause the tip to interact with the surface of a sample with low forces to characterize the surface down to atomic dimensions

Methodology Applied
Scientific EffectAtomic force interaction: Force

Implementation Method 2

probe 17 is often coupled to an oscillating actuator or drive 16 that is used to drive probe 17 to oscillate at or near a resonant frequency of cantilever 15

Methodology Applied
Scientific EffectResonant oscillation: Resonance

Implementation Method 3

a deflection detection apparatus 25 is typically employed to direct a beam towards the backside of probe 17, the beam then being reflected towards a detector 26

Methodology Applied
Scientific EffectOptical reflection: Reflection

Implementation Method 4

Scanner 24 is typically comprised of one or more actuators that usually generate motion in three mutually orthogonal directions (XYZ). Often, scanner 24 is a single integrated unit that includes one or more actuators to move either the sample or the probe in all three axes, for example, a piezoelectric tube actuator

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP3293527B1Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode
Publication Date: 2026.01.14 BRUKER NANO INC
  • EP3293527B1 patent drawingFigure 1
  • EP3293527B1 patent drawingFigure 2
  • EP3293527B1 patent drawingFigure 3

AI summary

An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.