Automated Pellicle Removal Apparatus for Photolithographic Masks
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing manual methods for removing pellicles from masks used in photolithographic processes are inefficient, leading to contamination and damage of cost-intensive masks due to non-standardized pellicle dimensions and adhesive properties, which cannot be accurately accounted for by operators.
Innovation Solution
An automated apparatus that uses a grip with spring-loaded fixing elements and a drive system to securely hold and release masks, combined with a detector for contactless determination of pellicle mount positions, and a controlled heating device with spikes to detach the pellicle using a controlled pulling force, minimizing manual intervention and ensuring reproducible forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If manual removal methods are used, then operators can handle non-standardized pellicles, but mask contamination and damage occur due to incorrect operator actions
Solution Approach 1:
The patent replaces manual mechanical operations with an automated mechanical system comprising a grip device, heating device, and pulling device. The system uses programmable control to automate the pellicle removal process, eliminating human error while maintaining adaptability to non-standardized pellicles through sensor-based position detection and adjustable pulling parameters.
Solution Approach 2:
The system incorporates self-adjusting features including spring-loaded fixing elements that automatically adapt to different mask sizes, sensors that automatically detect pellicle mount positions, and programmable control that adjusts pulling forces based on detected parameters, enabling the system to handle varied pellicles without manual intervention.
2Adaptability or versatility
If manual removal methods are used, then flexibility in handling different pellicle dimensions is maintained, but productivity is reduced and contamination risk increases
Solution Approach 1:
The system employs dynamic elements including spring-loaded fixing elements that automatically adjust to different mask dimensions, programmable control that adapts pulling parameters based on detected pellicle characteristics, and a heated pulling device that dynamically applies force. This enables efficient automated handling of non-standardized pellicles.
Solution Approach 2:
Manual operations are replaced with an automated system comprising a grip device for secure holding, a heating device for adhesive softening, and a pulling device for controlled removal. The programmable control coordinates these devices to efficiently handle various pellicle dimensions without manual intervention, significantly improving productivity.
3Manufacturing precision
If standardized grip forces are applied, then reproducible removal is achieved, but damage may occur to masks with different adhesive properties
Solution Approach 1:
The system changes physical parameters including temperature (via heating device to soften adhesive), force magnitude (via programmable pulling device), and force application rate. These parameter adjustments are controlled programmatically to match different adhesive properties while maintaining reproducible removal processes for each pellicle type.
Solution Approach 2:
The system incorporates sensors to detect pellicle mount positions and characteristics, providing feedback to the programmable control. The control adjusts pulling forces and heating parameters based on this feedback, enabling reproducible removal while adapting to different adhesive properties and pellicle configurations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables the reproducible and controlled removal of pellicles without damaging the masks, reducing the risk of contamination and allowing for precise alignment and detachment, thereby improving the purity and reliability of the mask handling process.
Implementation Method 1
The compressive forces acting via the fixing elements should in the respect preferably be applied by the action of spring force
Implementation Method 2
the respective mask is heated so that the adhesive used softens
Data Source
AI summary
An apparatus and a method for the removal of pellicles from masks which can be used for photolithographic purposes. The pellicles are removed from masks in a universal manner without them being further contaminated or damaged. In an apparatus, at least one grip is present for the manipulation of masks provided with pellicles which has at least two fixing elements which engage at the edge of a mask with exerted pressure force. There are moreover present in this connection at least one detector for the contactless determination of the position of mounts formed at the radially outer edge of pellicles, and a heating device for the heating of an adhesive with which pellicles are fastened to a mask with material continuity, and a removal apparatus of the pellicles from a mask having a mask fixing unit and a pellicle removal unit.