Peripherally Engaging Electrode Carrier for Plasma Processing

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Solution Overview

Problem

Existing electrode carriers for multi-component electrodes in plasma processing systems lack efficient mechanisms for secure handling and processing, particularly during reconditioning processes, where reciprocating supports can obstruct mounting recesses and may not effectively restrict movement or facilitate purge gas passage.

Innovation Solution

A peripherally engaging electrode carrier with a carrier frame and reciprocating electrode supports that include keyway slots and projections for restricted movement, and purge gas passageways to address obstruction and contamination issues during reconditioning, utilizing a carrier frame with an electrode accommodating aperture and mounting recesses, and keyway configurations for secure positioning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If reciprocating electrode supports are used to handle electrodes, then electrode handling flexibility is improved, but the supports obstruct mounting recesses during reconditioning

Engineering Contradiction:

Improveelectrode handling flexibilityVSAvoidobstruction of mounting recesses

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The electrode supports are designed to reciprocate between an extended position (for electrode handling) and a retracted position (clearing the mounting recesses during reconditioning). This dynamic positioning resolves the contradiction by allowing the supports to adapt their position based on the operational phase, eliminating obstruction during reconditioning while maintaining handling flexibility during electrode installation and removal.

Inventive Principle:

Principle #15Dynamics

2Manufacturing precision

If reciprocating electrode supports are used, then electrode positioning capability is improved, but movement restriction becomes insufficient

Engineering Contradiction:

Improveelectrode positioning capabilityVSAvoidmovement restriction

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The support system is segmented into multiple supports distributed around the electrode carrier. Each support can reciprocate independently along guided paths, allowing precise positioning of the electrode at specific locations while maintaining overall stability. The segmentation enables both high positioning capability and reliable movement control through distributed support points.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Guideways or keyway slots are introduced as intermediary structures that constrain the reciprocating motion of the electrode supports. These intermediaries provide precise linear paths for support movement, ensuring that the supports achieve accurate positioning while their movement is reliably restricted to predetermined trajectories, preventing unwanted degrees of freedom.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If mounting recesses are provided for electrode support, then electrode securing is improved, but contamination during reconditioning increases

Engineering Contradiction:

Improveelectrode securingVSAvoidcontamination during reconditioning

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The electrode supports are extracted from the mounting recesses during the reconditioning phase through reciprocating motion. By removing the supports from the recesses when reconditioning is performed, direct access to the recesses is enabled, allowing thorough cleaning and contamination removal while maintaining secure electrode mounting during normal operation when supports are engaged.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The mounting system transitions dynamically between two states: engaged state where supports are inserted into mounting recesses for secure electrode holding, and disengaged state where supports are retracted to allow contamination-free reconditioning access. This dynamic switching resolves the contradiction by providing both secure mounting and contamination prevention at different operational phases.

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS8276604B2Peripherally engaging electrode carriers and assemblies incorporating the same

Publication Date: 2012.10.02 LAM RES CORP

AI summary

In accordance with one embodiment of the present disclosure, an assembly is provided comprising a multi-component electrode and a peripherally engaging electrode carrier. The peripherally engaging electrode carrier comprises a carrier frame and a plurality of reciprocating electrode supports. The multi-component electrode is positioned in the electrode accommodating aperture of the carrier frame. The backing plate of the electrode comprises a plurality of mounting recesses formed about its periphery. The reciprocating electrode supports can be reciprocated into and out of the mounting recesses. Additional embodiments of broader and narrower scope are contemplated.