Permanent Magnet Lens Array for Charged-Particle Focusing
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Solution Overview
Problem
Conventional coil-based magnetic lenses in charged-particle optics systems occupy significant space, produce heat, and are difficult to fabricate, limiting the design and operation of charged-particle optic systems.
Innovation Solution
A permanent magnetic lens array is developed, comprising a planar volume of permanent magnetic material and soft magnetic material with axially symmetrical lens openings, arranged in a monolithic structure to form magnetic lenses with an axial magnetic field component, eliminating the need for coil-based lenses and simplifying fabrication and design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If coil-based magnetic lenses are used in charged-particle optics systems, then magnetic focusing function is achieved, but significant space is occupied between charged-particle source and specimen surface
Solution Approach 1:
The patent replaces the electromagnetic coil-based magnetic lens system with a permanent magnet-based system. The permanent magnet array generates the required magnetic field for charged-particle focusing without requiring electrical coils, power supply, or complex electromagnetic circuits. This substitution dramatically reduces the physical volume and structural complexity while maintaining the magnetic focusing function.
Solution Approach 2:
The patent changes the fundamental operating parameters by using permanently magnetized materials instead of electromagnets. The magnetic field is generated through the intrinsic magnetization of permanent magnet materials arranged in specific patterns (e.g., alternating polarity arrays), eliminating the need for electrical current and associated infrastructure, thereby reducing space requirements.
2Reliability
If coil-based magnetic lenses are used, then magnetic focusing is achieved, but significant heat is produced within the charged-particle optic system
Solution Approach 1:
The patent eliminates the electrical coil system that generates heat through resistive heating (Joule heating) by substituting it with a permanent magnet system. Permanent magnets generate magnetic fields without electrical current, thereby completely eliminating the heat generation associated with electromagnetic coils, improving thermal management of the charged-particle optics system.
3Reliability
If coil-based magnetic lenses are used, then magnetic focusing function is achieved, but fabrication of charged-particle optics system becomes difficult
Solution Approach 1:
The patent divides the magnetic lens system into discrete permanent magnet elements arranged in arrays or matrices. These segmented permanent magnet components can be individually fabricated, positioned, and assembled, simplifying the manufacturing process compared to fabricating large, complex electromagnetic coil assemblies. The segmented approach allows for modular construction and easier integration into the charged-particle optics system.
Solution Approach 2:
The patent replaces the complex electromagnetic system (requiring coil winding, insulation, electrical connections, and magnetic circuit components) with a simpler permanent magnet array system. This substitution eliminates multiple fabrication steps and assembly operations, making the charged-particle optics system easier to manufacture and assemble.
4Device complexity
If conventional single column charged-particle optic systems are used, then system simplicity is maintained, but current limits are encountered
Solution Approach 1:
The patent enables arrayed charged-particle systems by using permanent magnet lens arrays that can focus multiple charged-particle beams simultaneously. This segmentation of the focusing system into multiple independent beam channels allows for parallel processing, dramatically reducing scan time and improving productivity while maintaining manageable system complexity through modular architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The permanent magnetic lens array reduces manufacturing and operational constraints, allows for a compact and efficient charged-particle focusing system, and increases column density while eliminating heat sources and high voltage breakdowns.
Implementation Method 1
the plurality of lens openings of the volume of permanent magnetic material and the plurality of lens openings of the volume of soft magnetic material are configured to form a plurality of magnetic lenses, wherein each magnetic lens has a magnetic field with at least an axial component
Data Source
AI summary
A permanent magnetic lens array for charged-particle focusing includes a first sheet of soft magnetic material, wherein the first sheet of soft magnetic material includes a plurality of snorkel cone protrusions arranged in an array pattern, wherein each snorkel cone is axially symmetric and includes an opening passing from a first surface of the first sheet of soft magnetic material to a second surface of soft magnetic material, and a plurality of permanent magnetic elements, wherein each permanent magnetic element is axially symmetric and arranged concentrically with a snorkel cone of the first sheet of soft magnetic material, wherein the snorkel cones of the first sheet of soft magnetic material and the plurality of permanent magnetic elements are configured to form a plurality of magnetic lenses, wherein each magnetic lens has a magnetic field with an axial component oriented perpendicular to the first surface of the soft magnetic material.