Perovskite Array Substrate Patterning via Groove-Guided Vapor Conversion

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Solution Overview

Problem

Existing technologies face challenges in patterning perovskite materials at the micro/nano scale due to incompatibility with photoetching and ink-jet printing, leading to issues such as decomposition, poor stability, and high costs, preventing the formation of perovskite micro-array structures.

Innovation Solution

A method involving the formation of a patterned film layer with grooves on a substrate, where a first precursor structure is formed in the grooves, followed by reacting it with a gaseous second precursor to create a perovskite crystal structure, utilizing hydrophilic/hydrophobic properties to enhance adhesion and facilitate boundary definition, compatible with existing manufacturing equipment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If photoetching or ink-jet printing is used to pattern perovskite materials, then micro/nano scale structures can be formed, but the perovskite materials decompose and stability deteriorates

Engineering Contradiction:
Improvepatterning precisionVSAvoidperovskite stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The perovskite micro-array structure is divided into multiple independent perovskite crystal structures, each grown in separate grooves on the substrate. This segmentation allows each crystal to be formed independently through vapor-phase deposition, avoiding the decomposition issues associated with conventional patterning methods while maintaining micro-scale precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A patterned film layer is introduced as an intermediary structure between the substrate and the perovskite crystals. This film layer with grooves serves as a template that guides the vapor-phase deposition process, enabling precise patterning without direct contact between the perovskite material and the patterning equipment that would cause decomposition.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If conventional patterning methods are used, then manufacturing processes can be simplified, but equipment costs increase and perovskite micro-array structures cannot be formed

Engineering Contradiction:
Improveprocess simplicityVSAvoidequipment requirements
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The invention replaces mechanical patterning methods (photoetching, ink-jet printing) with a vapor-phase deposition process. This substitution eliminates the need for complex mechanical patterning equipment while maintaining the ability to form precise micro-array structures through controlled vapor deposition onto the patterned film layer template.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If perovskite materials are patterned at micro/nano scale, then array substrate performance is improved, but manufacturing costs increase due to equipment requirements

Engineering Contradiction:
Improvemicro-array structure formationVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patterned film layer with grooves serves as a disposable template that enables precise micro-array formation without requiring expensive specialized equipment. The template can be fabricated using conventional low-cost techniques, and the vapor-phase deposition process uses simple, widely available equipment, significantly reducing manufacturing costs while achieving micro-scale precision.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the formation of perovskite micro-array structures with improved fluorescence properties, optimizing array substrate performance and reducing manufacturing costs by avoiding the need for expensive equipment.

Implementation Method 1

disposing, in an environment of a gaseous second precursor, the substrate on which the first precursor structure is formed, such that the gaseous second precursor is reacted with the first precursor structure to form a perovskite crystal structure

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 2

acquiring a first precursor seed nucleus by precipitating a solute of the first precursor solution having the first concentration in the groove

Methodology Applied
Scientific EffectPrecipitation: Precipitation

Implementation Method 3

disposing, in a first precursor solution having a second concentration, the substrate on which the first precursor seed nucleus is formed, such that the first precursor seed nucleus grows up to form the first precursor structure

Methodology Applied
Scientific EffectCrystallization: Crystallisation

Implementation Method 4

one of a target side of the substrate and the patterned film layer is hydrophilic, and the other of the target side of the substrate and the patterned film layer is hydrophobic, wherein the target side of the substrate is the side, on which the patterned film layer is formed, of the substrate; and the groove is communicated with the substrate, hydrophilicity or hydrophobicity of the first precursor solution is the same as hydrophilicity or hydrophobicity of the target side of the substrate and is opposite to hydrophilicity or hydrophobicity of the patterned film layer

Methodology Applied
Scientific EffectWetting: Wetting

Data Source

PatentUS12426488B2Method for manufacturing array substrate, array substrate, display panel, and display device
Publication Date: 2025.09.23 BEIJING BOE TECH DEV CO LTD
  • US12426488B2 patent drawing
  • US12426488B2 patent drawing
  • US12426488B2 patent drawing

AI summary

A method for manufacturing an array substrate includes: forming a patterned film layer on a side of a substrate, wherein the patterned film layer is provided with a plurality of grooves; forming a first precursor structure in the groove, wherein a material of the first precursor structure includes a first precursor; and disposing, in an environment of a gaseous second precursor, the substrate on which the first precursor structure is formed, such that the gaseous second precursor is reacted with the first precursor structure to form a perovskite crystal structure; wherein one of the first precursor and the gaseous second precursor includes a metal halide, and the other of the first precursor and the gaseous second precursor includes one of a formamidine halide, a methyl-amine halide, a cesium halide, and a hydrogen sulfide.