Perovskite Capacitor Electrode Structure for Dielectric Stability

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Solution Overview

Problem

Perovskite crystal structures in dielectric layers of capacitors are unstable when used with noble metal or perovskite crystal structure electrodes, leading to deteriorated dielectric characteristics.

Innovation Solution

Employ electrodes with a reinforcement material and metallic material having a perovskite crystal structure, where the electronegativity of the metallic material is at least 0.6 greater than that of the reinforcement material, forming a superlattice structure to maintain crystallinity and stability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If noble metal or perovskite crystal structure electrode materials are used, then electrode conductivity is improved, but the perovskite crystal structure of the dielectric layer becomes unstable

Engineering Contradiction:
Improveelectrode conductivityVSAvoidperovskite crystal structure stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

A seed layer comprising perovskite crystal structure is introduced as an intermediary between the electrode and the dielectric layer. This seed layer maintains the perovskite crystal structure stability while allowing the electrode to provide high conductivity. The seed layer acts as a buffer that prevents direct interaction between the electrode materials and the dielectric layer, thereby resolving the contradiction between conductivity and structural stability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The electrode structure is designed as a composite comprising multiple layers including the seed layer with perovskite crystal structure and additional conductive layers. This composite structure combines the benefits of perovskite crystal structure stability with high electrode conductivity, allowing both requirements to be satisfied simultaneously through material composition rather than single-material selection.

Inventive Principle:
Principle #40Composite materials

2Reliability

If perovskite crystal structure dielectric layer is used, then permittivity is improved, but crystallinity stability deteriorates when used with certain electrode materials

Engineering Contradiction:
ImprovepermittivityVSAvoidcrystallinity stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The seed layer is formed preliminarily before depositing the dielectric layer. This preliminary perovskite crystal structure provides a stable template that guides the crystallization of the subsequent dielectric layer, ensuring that the high permittivity perovskite structure is maintained throughout the dielectric layer formation process without degradation from electrode interaction.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The seed layer serves as a protective intermediary that shields the perovskite crystal structure of the dielectric layer from destabilizing interactions with the electrode materials. This intermediary layer allows the dielectric layer to maintain its high permittivity perovskite structure while being in close proximity to the electrode.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS20250220931A1Capacitor and semiconductor device including the same
Publication Date: 2025.07.03 SAMSUNG ELECTRONICS CO LTD
  • US20250220931A1 patent drawing
  • US20250220931A1 patent drawing
  • US20250220931A1 patent drawing

AI summary

A capacitor includes a first electrode including a first reinforcement material having a perovskite crystal structure; and a first metallic material having a perovskite crystal structure; a second electrode on the first electrode; and a dielectric layer between the first electrode and the second electrode, wherein the first metallic material has greater a greater electronegativity than that of the first reinforcement material.