Phase Analysis Screen Comparison for Faster Condition Tuning
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Solution Overview
Problem
Existing phase analysis methods in scanning electron microscopes require repeated analysis under different conditions to find optimal settings, necessitating time-consuming reanalysis under original conditions to verify results.
Innovation Solution
A phase analyzer with a data acquisition unit, phase analysis unit, and display control unit that allows simultaneous display of phase analysis results before and after condition changes on separate screens, enabling easy comparison and reproduction of initial results.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If phase analysis is repeated under different conditions to find optimal settings, then the quality of phase analysis results is improved, but the time required for analysis increases significantly
Solution Approach 1:
The system creates a copy of the original phase analysis results and displays it on a first screen. When conditions are changed and new analysis is performed, the results are displayed on a second screen. This copying mechanism allows users to compare original and modified results simultaneously without needing to re-run the original analysis, thus saving time while maintaining the ability to evaluate different condition qualities.
Solution Approach 2:
The system performs preliminary phase analysis under original conditions and stores the results before condition changes are made. This preliminary action ensures that when users want to compare results, the original analysis is already available, eliminating the need to re-run it and reducing overall analysis time.
2Reliability
If phase analysis is repeated under original conditions to verify results after condition changes, then the reliability of results is improved, but the productivity decreases
Solution Approach 1:
The system displays a copy of the original phase analysis results on a first screen and the new results under changed conditions on a second screen. This allows users to verify the reliability of results by comparing them side-by-side without needing to re-run the original analysis, thus maintaining reliability while improving productivity.
3Adaptability or versatility
If multiple phase analysis results are stored and managed, then the adaptability for comparing different conditions is improved, but the device complexity increases
Solution Approach 1:
The system segments the display into two distinct screens: a first screen for original phase analysis results and a second screen for results under changed conditions. This segmentation allows users to view and compare multiple analysis results simultaneously without requiring a complex unified management system, thus improving adaptability while keeping device complexity low.
Data Source
AI summary
A phase analyzer includes a data acquisition unit that acquires spectrum imaging data in which a position on a sample is associated with a spectrum of a signal from the sample; a phase analysis unit that performs phase analysis based on the spectrum imaging data; a display control unit that displays results of the phase analysis on a first screen; and a condition reception unit that receives an operation for changing a condition for the phase analysis, when the condition reception unit has received the operation for changing the condition, the phase analysis unit performing phase analysis under the changed condition, the display control unit displaying on a second screen the results of the phase analysis performed under the changed condition and when a predetermined operation has been performed, the display control unit reflecting on the first screen the results of the phase analysis displayed on the second screen.