Phase Change Memory Element with 3D Groove Electrode

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional phase change random access memory (PRAM) devices face challenges in achieving high heating efficiency and fast write operations due to heat dissipation issues, which result in increased write current and voltage requirements, making them unsuitable for low-voltage devices.

Innovation Solution

A non-volatile memory element with a recording layer containing phase change material, where the top electrode is in contact with the growth initiation surface of the recording layer, forming a three-dimensional structure that reduces heat dissipation to the bit line without increasing the recording layer thickness, allowing for enhanced heating efficiency and faster write operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If the upper surface of the recording layer is covered with a top electrode to reduce heat dissipation, then heating efficiency is improved, but the recording layer thickness must be greatly increased which slows down write operations

Engineering Contradiction:
Improveheating efficiencyVSAvoidwrite operation speed
Core Design Contradiction:
Use of energy by moving objectVSSpeed

Solution Approach 1:

The patent transitions from a planar recording layer structure to a three-dimensional structure where the recording layer is formed in a groove. This vertical configuration allows the top electrode to contact the recording layer from above while maintaining a compact overall structure, eliminating the need to increase layer thickness and preserving fast write speeds while achieving superior heat confinement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The recording layer is nested within a groove structure, with the top electrode positioned above it. This nested arrangement allows the electrode to be in direct contact with the recording layer surface, creating an efficient heating interface without requiring increased thickness of the recording layer itself, thus resolving the contradiction between heating efficiency and write speed.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Loss of energy

If the recording layer thickness is increased to reduce heat dissipation to the bit line, then heat dissipation is reduced, but it takes longer to form the layer and stronger electric fields are required

Engineering Contradiction:
Improveheat dissipation to bit lineVSAvoidlayer formation time
Core Design Contradiction:
Loss of energyVSLoss of time

Solution Approach 1:

By forming the recording layer in a groove (vertical dimension) rather than as a planar layer (horizontal dimension), the patent achieves effective heat isolation from the bit line without increasing the horizontal thickness of the recording layer. This reduces both heat dissipation losses and the time required to form the layer.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The groove structure creates a localized region where the recording layer is positioned away from the bit line, concentrating the thermal interaction between the top electrode and recording layer while isolating the bit line from heat dissipation. This local structural modification reduces heat loss without requiring overall layer thickening.

Inventive Principle:
Principle #3Local quality

3Device complexity

If a planar recording layer is used with top and bottom electrodes, then the structure is simple, but heat dissipation to the bit line increases reducing heating efficiency

Engineering Contradiction:
Improvestructural simplicityVSAvoidheating efficiency
Core Design Contradiction:
Device complexityVSUse of energy by moving object

Solution Approach 1:

The patent maintains structural simplicity by using only top and bottom electrodes while improving heating efficiency through the three-dimensional groove configuration. The recording layer is formed in a groove that positions it optimally between the electrodes, creating efficient thermal coupling with the top electrode while isolating it from the bit line, thus achieving high heating efficiency without complicating the electrode structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration decreases the write current and enhances writing speed by minimizing heat radiated at the bit line, thereby improving the overall heating efficiency of the memory element.

Implementation Method 1

This phase change is effected by the phase change material being heated when a write current is applied

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

the storage of data is based on the phase state of phase change material contained in the recording layer. Specifically, there is a big difference between the electrical resistivity of the material in the crystalline state and the electrical resistivity in the amorphous state

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 3

it is desirable to use a structure that does not readily allow diffuse of the heat generated by the write current. In one structure for achieving, the upper surface of a recording layer is covered with a top electrode having low thermal conductivity to cut down on heat dissipation

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS7671356B2Electrically rewritable non-volatile memory element and method of manufacturing the same
Publication Date: 2010.03.02 MICRON TECHNOLOGY INC
  • US7671356B2 patent drawing
  • US7671356B2 patent drawing
  • US7671356B2 patent drawing

AI summary

A non-volatile memory element comprising a bottom electrode 12, a top electrode 17 provided on the bottom electrode 12, and a recording layer 18 containing phase change material connected between the bottom electrode 12 and the top electrode 17. In accordance with this invention, the top electrode 17 is in contact with a growth initiation surface 18a of the recording layer 17. This structure can be obtained by forming the top electrode 17 before the recording layer 18, resulting in a three-dimensional structure. This decreases heat dissipation to the bit line without increasing the thickness of the recording layer 18.