Phase-Modulated Laser Optics for Condenser Lens Variation Correction

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Solution Overview

Problem

Laser processing apparatuses experience inter-apparatus differences due to optical strains, leading to varying processing results, which are often attributed to individual differences in condenser lenses, resulting in high replacement costs and increased apparatus costs when using wavefront sensors for correction.

Innovation Solution

A laser processing apparatus with a phase modulation element between the laser oscillator and condenser lens, which applies a combined pattern of shape correction and adjustment patterns to correct actual lens shape deviations and adjust optical characteristics, preventing individual differences in condenser lenses at each processing point.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If condenser lenses with small individual differences are selected to eliminate inter-apparatus differences, then processing consistency is improved, but apparatus cost and replacement expense increase

Engineering Contradiction:
Improveprocessing consistencyVSAvoidapparatus cost
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent changes the optical parameters of the laser beam by applying different voltage patterns to the phase modulation element. This allows dynamic adjustment of the beam's wavefront and intensity distribution to compensate for condenser lens individual differences, achieving consistent processing results without requiring expensive precision-matched lenses

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The phase modulation element acts as an intermediary between the laser oscillator and the condenser lens. It introduces a controllable phase modulation to the laser beam before it passes through the condenser lens, enabling correction of optical path deviations caused by lens individual differences and achieving consistent focal spot characteristics

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If wavefront sensors are used to correct spot shapes of laser beam, then processing consistency is improved, but apparatus cost increases

Engineering Contradiction:
Improvespot shape consistencyVSAvoidapparatus cost
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts the wavefront correction function from the expensive wavefront sensor system and implements it using the existing phase modulation element. By applying pre-calculated voltage patterns directly to the phase modulation element, the system achieves spot shape correction without requiring additional wavefront sensing hardware

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent creates a mathematical model (copy) of the relationship between phase modulation voltages and resulting spot shapes. This model allows the system to predict and correct spot shape deviations by applying appropriate voltage patterns to the phase modulation element, eliminating the need for expensive real-time wavefront sensing

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for the prevention of inter-apparatus differences at a lower cost by using existing phase modulation elements, eliminating the need for expensive lens replacements and wavefront sensors, thereby reducing overall apparatus costs and ensuring consistent processing results.

Implementation Method 1

a phase modulation element arranged between the laser oscillator and the condenser lens. The control unit inputs a combined pattern of a shape correction pattern which is configured to correct differences between an actual shape and design values of the condenser lens, and an adjustment pattern which is configured to adjust optical characteristics of the laser beam at each processing point

Methodology Applied
Scientific EffectPhase modulation: Phase Modulation

Implementation Method 2

applies voltages corresponding to the combined pattern to the phase modulation element, thereby preventing individual differences of the condenser lens

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 3

a condenser lens that condenses the laser beam emitted from the laser oscillator

Methodology Applied
Scientific EffectLens focusing: Lens

Data Source

PatentUS11752574B2Laser processing apparatus and adjustment method for laser processing apparatus
Publication Date: 2023.09.12 DISCO CORP
  • US11752574B2 patent drawing
  • US11752574B2 patent drawing
  • US11752574B2 patent drawing

AI summary

A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator, a condenser lens that condenses a laser beam emitted from the laser oscillator, and a phase modulation element arranged between the laser oscillator and the condenser lens. Individual differences of the condenser lens are prevented by applying, to the phase modulation element, voltages corresponding to a combined pattern of a shape correction pattern which is configured to correct differences between an actual shape and design values of the condenser lens, and an adjustment pattern which is configured to adjust optical characteristics of the laser beam at each processing point.