Photo Detection Element P/N Laminated Guard Ring Electric Field Relaxation

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Solution Overview

Problem

Current photo detection elements face challenges in enhancing photon detective efficiency, particularly due to issues with electric field concentration and curvature design affecting avalanche multiplication and dark current suppression.

Innovation Solution

The photo detection element incorporates a P/N laminated guard ring structure with specific conductivity types and curvature radii to optimize electric field distribution and carrier multiplication, improving photon detective efficiency by 8.6% compared to standard designs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a standard guard ring structure is used, then the device complexity is low, but the photon detective efficiency is insufficient

Engineering Contradiction:
Improvephoton detective efficiencyVSAvoidguard ring structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The guard ring structure is segmented into multiple regions with alternating conductivity types (first conductivity type and second conductivity type) arranged in a laminated pattern. This segmentation allows different regions to perform specialized functions: some regions focus on electric field relaxation while others optimize avalanche multiplication, thereby improving photon detection efficiency without requiring a complete redesign of the entire guard ring structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the guard ring are assigned different conductivity types and curvature radii to create local variations in electric field distribution. The first conductivity type regions are optimized for one function while the second conductivity type regions are optimized for another function, allowing each local area to contribute optimally to the overall photon detection performance.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If the curvature radius is reduced to improve detection precision, then the electric field concentration increases, but this causes after-pulse noise

Engineering Contradiction:
Improvedetection precisionVSAvoidafter-pulse noise
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The guard ring is divided into multiple segments with different curvature radii. Some segments have smaller curvature radii to provide sharp electric field termination and improve detection precision, while other segments have larger curvature radii to distribute the electric field more gently and reduce after-pulse noise. This segmented approach allows both contradictory requirements to be satisfied in different locations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different curvature radii are assigned to different regions of the guard ring based on their specific functional requirements. Regions where sharp field termination is needed have smaller curvature radii, while regions where field distribution is critical have larger curvature radii. This local optimization resolves the contradiction between detection precision and after-pulse noise suppression.

Inventive Principle:
Principle #3Local quality

3Reliability

If the electric field is concentrated to enhance avalanche multiplication, then the photon detective efficiency improves, but the dark current increases

Engineering Contradiction:
Improvephoton detective efficiencyVSAvoiddark current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The guard ring structure is segmented into regions with alternating conductivity types, creating a laminated pattern that distributes the electric field in a controlled manner. This segmentation allows the electric field to be concentrated in specific avalanche multiplication regions to improve photon detection efficiency, while adjacent regions with different conductivity types provide field relaxation paths that suppress dark current generation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The alternating conductivity type regions act as intermediaries that mediate between the need for electric field concentration and dark current suppression. The first conductivity type regions facilitate avalanche multiplication by concentrating the field, while the second conductivity type regions serve as intermediary zones that relax the field and provide alternative carrier paths, thereby reducing dark current.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The P/N laminated guard ring structure enhances photon detective efficiency by effectively relaxing electric field concentrations and reducing after-pulse noise, achieving improved sensitivity and uniformity in photo detection.

Implementation Method 1

a third region of the first conductivity type provided between the first region and the second region, a fourth region of the second conductivity type provided so as to surround a periphery of the second region

Methodology Applied
Scientific EffectElectric field distribution: Electric Field

Implementation Method 2

improving photon detective efficiency by 8.6% compared to standard designs

Methodology Applied
Scientific EffectAvalanche multiplication: Avalanche Breakdown

Implementation Method 3

incident light incident from above the second region 113 is subjected to photoelectric conversion in the silicon substrate 101

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS11255954B2Photo detection element, photo detection system, lidar device and vehicle comprising a fifth region of first conductivity type between a first region and a fourth region
Publication Date: 2022.02.22 KK TOSHIBA
  • US11255954B2 patent drawing
  • US11255954B2 patent drawing
  • US11255954B2 patent drawing

AI summary

In one embodiment, a photo detection element includes a first region of a first conductivity type, a second region of a second conductivity type, a third region of the first conductivity type provided between the first region and the second region, a fourth region of the second conductivity type provided so as to surround a periphery of the second region, in a direction crossing with a direction from the first region toward the second region, and a fifth region of the first conductivity type provided between the first region and the fourth region.