Photodetection Optical Stack for Stress Migration Suppression
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Solution Overview
Problem
Photodetection devices with conductor layers are prone to stress migration, which can affect the performance and reliability of optical elements like plasmonic filters and wire grid polarizers.
Innovation Solution
A photodetection device design that incorporates a stacked structure with a first conductor layer, an intermediate layer, and a second conductor layer, where the intermediate layer is higher in rigidity than the conductor layers, to suppress stress migration and maintain optical element performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conductor layer is used in optical elements, then optical functionality is achieved, but stress migration occurs affecting reliability
Solution Approach 1:
An intermediate layer is introduced between the first conductor layer and the second conductor layer to act as a stress barrier. This intermediate layer prevents stress migration from occurring in the conductor layers while maintaining the optical functionality of the optical element.
Solution Approach 2:
The optical element uses a composite structure consisting of multiple layers including conductor layers and an intermediate layer with different material properties. This composite structure combines the optical functionality of conductor layers with the stress resistance of the intermediate layer.
2Reliability
If a stacked structure with intermediate layer is used, then stress migration is suppressed, but device complexity increases
Solution Approach 1:
The conductor layer is segmented into a first conductor layer and a second conductor layer separated by an intermediate layer. This segmentation allows the intermediate layer to interrupt stress migration paths while maintaining the overall conductor functionality for optical operations.
Solution Approach 2:
The intermediate layer serves as a mediator between the first and second conductor layers, providing stress resistance without significantly complicating the device structure. The intermediate layer is integrated into the existing layered architecture of the optical element.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces stress migration in photodetection devices, enhancing the reliability and performance of optical elements by limiting metal movement and maintaining light transmission efficiency.
Implementation Method 1
a guided mode resonance (GMR) filter is an optical filter capable of transmitting only light in a narrow wavelength band (narrow band) by combining a diffraction grating and a clad-core structure
Implementation Method 2
It utilizes the resonance between the guided mode generated in the waveguide and the diffracted light
Implementation Method 3
a semiconductor layer including a photoelectric conversion unit
Data Source
AI summary
An object of the present technology is to provide a photodetection device in which occurrence of stress migration is suppressed. A photodetection device includes: a semiconductor layer including a photoelectric conversion unit; an optical element that includes a base material and an opening array formed in the base material, supplies light selected by the opening array to the photoelectric conversion unit, and is arranged so as to overlap the photoelectric conversion unit in plan view, in which the base material has a stacked structure including a first conductor layer, an intermediate layer, and a second conductor layer in this order from the semiconductor layer side.