Photodetector Substrate Depth Control for Dark Current Reduction

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Solution Overview

Problem

Conventional LIDAR systems face detection accuracy issues due to dark current generated by minority carriers in photodetectors, which can lead to spurious output signals and increased time constants, affecting the ability to accurately measure illumination events.

Innovation Solution

The introduction of surface defects, crystallographic defects, limited substrate depth, specific band structures, anti-reflective layers, and band-reject optical filters to mitigate dark current by reducing minority carrier photoexcitation and diffusion to the detection region.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If sensitive photodetectors (APD/SPAD) are used to detect light, then detection sensitivity is improved, but dark current increases causing spurious signals

Engineering Contradiction:
Improvedetection sensitivityVSAvoiddark current
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and removes minority carriers (electrons and holes) that cause dark current through recombination centers introduced into the substrate. By selectively removing harmful carriers before they reach the detection region, the patent maintains high detection sensitivity while eliminating spurious signals from dark current.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent converts the harmful effect of minority carrier diffusion into a beneficial recombination process. By introducing recombination centers, the patent causes minority carriers to recombine harmlessly in the substrate rather than reaching the detection region, thus transforming the dark current problem into a solution mechanism.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Measurement precision

If substrate depth is increased to reduce surface recombination, then detection efficiency improves, but minority carrier diffusion distance increases causing longer time constants

Engineering Contradiction:
Improvedetection efficiencyVSAvoidtime constant
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies local quality by creating specific recombination regions at controlled depths within the substrate. Rather than uniformly treating the entire substrate, the patent introduces recombination centers at specific locations where they can efficiently remove minority carriers without requiring increased substrate depth, thus maintaining both detection efficiency and short time constants.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent performs preliminary action by pre-introducing recombination centers into the substrate before minority carriers can diffuse to the detection region. This proactive approach ensures that minority carriers are removed early in their diffusion path, preventing them from reaching the detection region and causing dark current, while also reducing the overall time constant.

Inventive Principle:
Principle #10Preliminary action

3Power

If light source irradiation is increased to improve signal strength, then detection signal improves, but minority carrier photoexcitation increases causing more dark current

Engineering Contradiction:
Improvesignal strengthVSAvoidminority carrier photoexcitation
Core Design Contradiction:
PowerVSObject-generated harmful factors

Solution Approach 1:

The patent introduces recombination centers as intermediary elements between the light source and the detection region. These recombination centers act as mediators that capture and remove minority carriers photoexcited by the light source before they can reach the detection region. This allows the system to use higher light intensities for stronger signals while the intermediary recombination centers prevent the corresponding increase in dark current.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These techniques effectively reduce dark current, improving photodetector performance by minimizing spurious signals and shortening the time constant associated with detection events, allowing for more accurate and rapid light detection.

Implementation Method 1

minority carriers may be photoexcited in the substrate based on light emitted from the light source

Methodology Applied
Scientific EffectPhotoexcitation: Photoelectric Effect

Implementation Method 2

The surface defects allow for recombination of electrons and holes so as to mitigate dark current arising from minority carriers photoexcited in the substrate

Methodology Applied
Scientific EffectRecombination:

Implementation Method 3

polishing or planarizing a backside of the substrate to prevent reflections within the substrate of the light from the light source

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 4

introducing an anti-reflective layer to permit photons from the light source to exit the substrate

Methodology Applied
Scientific EffectAbsorption: Absorption (EM radiation)

Implementation Method 5

introducing a band-reject optical filter that filters light of a wavelength corresponding to the light source

Methodology Applied
Scientific EffectOptical filtering: Filter (optical)

Implementation Method 6

a photodetector coupled to the substrate. The photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the device

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentUS20240243209A1Controlling Detection Time in Photodetectors
Publication Date: 2024.07.18 WAYMO LLC
  • US20240243209A1 patent drawing
  • US20240243209A1 patent drawing
  • US20240243209A1 patent drawing

AI summary

Example embodiments relate to controlling detection time in photodetectors. An example embodiment includes a device. The device includes a substrate. The device also includes a photodetector coupled to the substrate. The photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the device. A depth of the substrate is at most 100 times a diffusion length of a minority carrier within the substrate so as to mitigate dark current arising from minority carriers photoexcited in the substrate based on the light emitted from the light source.