Photodiode Interlayer Reduces Dark Current

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Solution Overview

Problem

Photodiodes with germanium substrates face challenges in reducing dark current, which degrades their performance and accuracy, as existing methods like chemical processing and doping are either ineffective or costly and complex.

Innovation Solution

Incorporating an interlayer into selected portions of the electrode layer of the photodiode, specifically using materials like TiO2 to minimize conduction band offset and enhance the hole Schottky barrier height, thereby reducing dark current without compromising photocurrent collection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If chemical processing is performed on the substrate to remove dark current, then dark current is reduced, but photocharge collection capability deteriorates

Engineering Contradiction:
Improvedark currentVSAvoidphotocharge collection capability
Core Design Contradiction:
Object-generated harmful factorsVSProductivity

Solution Approach 1:

The patent applies different treatments to different regions of the photodiode structure. An interlayer is selectively formed only in the electrode layer at specific contact regions, while other regions maintain their original properties. This localized modification reduces dark current at contact points without affecting the photocharge collection capability in the active region.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The interlayer acts as an intermediary substance between the electrode and the semiconductor substrate. This intermediate layer modifies the interface properties to reduce dark current while maintaining or improving the overall device performance. The interlayer serves as a mediator that reconciles the conflicting requirements of dark current reduction and photocharge collection.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-generated harmful factors

If doping methods are used to reduce dark current, then dark current is reduced, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvedark currentVSAvoidmanufacturing complexity
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The patent changes the structural parameter of the device by introducing an interlayer with specific material properties (bandgap, thickness) rather than changing the chemical composition through doping. This parameter change approach achieves dark current reduction through physical structure modification, avoiding the complex multi-step doping processes required by conventional methods.

Inventive Principle:
Principle #35Parameter changes

3Object-generated harmful factors

If an interlayer is inserted into the electrode layer, then dark current is reduced, but device structure becomes more complex

Engineering Contradiction:
Improvedark currentVSAvoiddevice structure
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The interlayer is not formed throughout the entire device but only in specific portions of the electrode layer where it is most needed for dark current reduction. This partial application approach minimizes the structural complexity addition while achieving the primary goal of dark current suppression in critical regions.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces dark current while maintaining or improving photodiode performance, offering simpler and cost-effective manufacturing compared to traditional doping methods, with the interlayer thickness influencing the extent of dark current reduction.

Implementation Method 1

enhance the hole Schottky barrier height

Methodology Applied
Scientific EffectSchottky barrier:

Implementation Method 2

minimize conduction band offset

Methodology Applied
Scientific EffectConduction band offset:

Implementation Method 3

A photodiode is a semiconductor device that converts an optical signal into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS10312399B2Photodiode with decreased dark current and method for manufacturing the same
Publication Date: 2019.06.04 SK HYNIX INC
  • US10312399B2 patent drawing
  • US10312399B2 patent drawing
  • US10312399B2 patent drawing

AI summary

A photodiode having a reduced dark current includes a semiconductor layer, a first contact part, a second contact part, and an active region. The first contact part disposed in a first region of the semiconductor layer includes an interlayer and at least one metal layer. The second contact part disposed in a second region of the semiconductor layer includes at least one metal layer. The active region is disposed between the first contact part and the second contact part. The first contact part and the second contact part are arranged asymmetrical to each other.