Pick and Place Manipulator for Multi-Head Surface Scanning

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Solution Overview

Problem

Existing scanning probe microscopy devices face challenges with low throughput due to the time-consuming process of scanning macroscopic surfaces with high resolution, making them impractical for industrial manufacturing processes.

Innovation Solution

A device and method utilizing a pick and place manipulator to position multiple sensor heads on a support structure with an optical reference grid, allowing simultaneous measurement and modification of surface features across a dense arrangement, facilitated by a gripper and actuator system that moves heads transversely and a stage actuator for parallel movement of the support structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single microscopic probe is used to scan the surface with high resolution, then measurement precision is improved, but productivity deteriorates due to significant processing time required for macroscopic surfaces

Engineering Contradiction:
Improvesurface measurement precisionVSAvoidthroughput
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The invention divides the measurement task into multiple parallel operations by using a plurality of sensor heads (e.g., 5, 10, or more probes) that simultaneously scan different regions of the sample surface. Each sensor head independently measures its designated area with high precision, and the results are combined to achieve complete surface coverage, thereby resolving the contradiction between precision and productivity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a single-point sequential measurement approach to a multi-point parallel measurement approach by arranging multiple sensor heads in a spatial array. This dimensional expansion allows simultaneous measurement across the surface, effectively increasing throughput while maintaining the high precision characteristics of individual probes

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If multiple sensor heads are positioned by means of arms, then productivity is improved through simultaneous scanning, but device complexity increases

Engineering Contradiction:
ImprovethroughputVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The support structure serves multiple functions: it provides mechanical support for the sensor heads, establishes precise positioning through the reference surface and optical reference grid, and enables coordinated movement of all sensor heads. This multi-functional design reduces the need for separate positioning mechanisms for each head, thereby managing complexity while maintaining high throughput

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention replaces complex mechanical positioning arms with an optical positioning system using an optical reference grid and reference surface. This substitution simplifies the mechanical structure while achieving precise positioning of multiple sensor heads, reducing device complexity while maintaining productivity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-throughput scanning by allowing multiple sensor heads to operate simultaneously, reducing processing time and increasing efficiency for industrial applications.

Implementation Method 1

the reference surface comprises and optical reference grid and wherein the heads are separate from the sample carrier and the support structure

Methodology Applied
Scientific EffectOptical reference grid:

Data Source

PatentEP3338098B1Device and method for measuring and/or modifying surface features on a surface of a sample.
Publication Date: 2025.06.25 NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
  • EP3338098B1 patent drawingFigure 1
  • EP3338098B1 patent drawingFigure 2a
  • EP3338098B1 patent drawingFigure 2b

AI summary

The present document describes a device for measuring and/or modifying surface features and/or sub-surface features on or below a surface of a sample. The system comprises a sample carrier, one or more heads, and a support structure. The support structure comprises a reference surface for providing a positioning reference. The heads are separate from the sample carrier and the support structure, and the device further comprises a pick and place manipulator arranged for positioning the heads at respective working positions. The manipulator comprises a gripper and an actuator for moving the gripper, wherein the actuator is arranged for providing a motion in a direction transverse to the reference surface. The gripper is arranged for engaging and releasing the respective heads from the transverse motion. The document also describes a method of measuring and/or modifying surface features on a surface of a sample.