Substrate Transfer Picker with Real-Time Suction Force Feedback

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Solution Overview

Problem

Existing substrate transferring systems face challenges in managing the suction force of picker units, as insufficient suction force leads to substrate detachment, while excessive force can damage the substrate, necessitating a precise control mechanism.

Innovation Solution

A system incorporating a pressure measuring unit with piezoelectric elements or load cells to measure and adjust the suction force of the picker unit, ensuring a suitable adhesion force without damaging the substrate, by positioning these elements between the picker and the work table to monitor and calibrate the suction force and adhesion force in real-time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the suction force of the suction unit is increased to firmly adhere the substrate, then the substrate adhesion is improved, but the substrate may be damaged

Engineering Contradiction:

Improvesubstrate adhesionVSAvoidsubstrate damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent implements a feedback mechanism by placing pressure-sensitive elements between the suction unit and substrate to detect the actual suction force in real-time. The control unit receives this pressure information and adjusts the suction force accordingly, creating a closed-loop control system that prevents both insufficient adhesion and excessive force that could damage the substrate.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent changes the physical state and parameters of the suction force by using pressure-sensitive elements (piezoelectric elements or load cells) that convert mechanical pressure into electrical signals. This allows dynamic adjustment of the suction force parameter based on real-time feedback, enabling precise control to avoid substrate damage while maintaining reliable adhesion.

Inventive Principle:

Principle #35Parameter changes

2Object-affected harmful factors

If the suction force of the suction unit is decreased to prevent substrate damage, then the substrate safety is improved, but the substrate may not firmly adhere

Engineering Contradiction:

Improvesubstrate damageVSAvoidsubstrate adhesion

Core Design Contradiction:

Object-affected harmful factorsVSReliability

Solution Approach 1:

The pressure-sensitive elements provide continuous feedback on the suction force applied to the substrate. When the suction force is reduced to prevent damage, the feedback signal allows the control unit to compensate by optimizing the adhesion within the safe force range, ensuring reliable substrate holding without exceeding damage thresholds.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system dynamically adjusts the suction force based on real-time pressure feedback rather than using a fixed force level. This dynamic control allows the suction force to be optimized for each specific substrate and situation, maintaining the minimum necessary force for firm adhesion while staying below the threshold that causes damage.

Inventive Principle:

Principle #15Dynamics

3Measurement precision

If a pressure measuring unit is integrated into the suction unit to measure suction force, then the suction force control precision is improved, but the device complexity increases

Engineering Contradiction:

Improvesuction force measurementVSAvoidsystem structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent uses pressure-sensitive elements (piezoelectric elements or load cells) as intermediary components that are placed between the suction unit and the substrate. These intermediaries convert mechanical suction force into measurable electrical signals without requiring complex integration into the suction unit itself, thus achieving precise measurement while minimizing structural complexity.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces complex mechanical force measurement mechanisms with electrical sensing elements (piezoelectric elements or load cells). These electrical sensors provide precise measurement of suction force through electrical signals rather than mechanical means, simplifying the overall system structure while improving measurement precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively secures substrates with a suitable suction force, preventing detachment and damage, thereby ensuring reliable and efficient substrate transfer operations.

Implementation Method 1

The pressure-sensitive element may be a piezoelectric element or a load cell

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a pressure measuring unit separated from the suction unit and including a pressure-sensitive element

Methodology Applied

Scientific EffectForce detection: Force

Data Source

PatentUS11008181B2System for transferring substrate

Publication Date: 2021.05.18 SAMSUNG DISPLAY CO LTD

AI summary

A system for transferring a substrate may adjust a suction force to a suitable level. The system may include a work table, a picker, and a pressure measuring unit. The work table may include a work area for supporting the substrate. The picker may be disposed above the work table and may include a suction unit for providing the suction force. The pressure measuring unit may overlap the suction unit and may include a pressure-sensitive element for facilitating adjustment of the suction force.