Piezoelectric Actuator Monolithic Energizing Part

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Solution Overview

Problem

Existing piezoelectric actuators face challenges in downsizing due to separately formed base and spring portions, which complicates manufacturing and affects reliability and efficiency.

Innovation Solution

The integration of base and spring portions within the energizing part of the piezoelectric actuator, using silicon substrates for improved accuracy and manufacturing ease, allows for a more compact design and stable energizing forces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If the base portion and spring portions are separately formed and fixed using screws, then the manufacturing process is simpler, but the actuator size increases and reliability decreases

Engineering Contradiction:

Improvemanufacturing process simplicityVSAvoidactuator size

Core Design Contradiction:

Ease of manufactureVSVolume of moving object

Solution Approach 1:

The base portion and spring portions are integrated into a single energizing part formed as one piece from a silicon substrate. This merging eliminates the need for separate components and screw fixations, directly reducing the actuator size while maintaining manufacturing feasibility through semiconductor fabrication processes

Inventive Principle:

Principle #5Merging (Combining)

2Ease of operation

If the base portion and spring portions are separately formed and fixed using screws, then assembly is easier, but the actuator size increases

Engineering Contradiction:

Improveassembly easeVSAvoidactuator size

Core Design Contradiction:

Ease of operationVSVolume of moving object

Solution Approach 1:

The energizing part is formed as a monolithic structure where the base portion and spring portions are integrally connected. This eliminates assembly steps requiring screws while minimizing the overall volume by removing unnecessary interfaces and fastening components

Inventive Principle:

Principle #5Merging (Combining)

3Ease of repair

If the base portion and spring portions are separately formed, then component replacement is easier, but the actuator size increases and reliability decreases

Engineering Contradiction:

Improvecomponent replacement easeVSAvoidactuator reliability

Core Design Contradiction:

Ease of repairVSReliability

Solution Approach 1:

The integrated energizing part eliminates interfaces between separate components, removing potential failure points from screw connections and component mismatches. The monolithic structure enhances reliability while the silicon substrate allows for precise manufacturing and consistent performance

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The use of silicon substrate provides both mechanical integrity for the integrated structure and compatibility with semiconductor manufacturing processes, enabling high precision and reliability while maintaining ease of production through established fabrication techniques

Inventive Principle:

Principle #40Composite materials

4Adaptability or versatility

If separately formed components are used, then manufacturing flexibility is higher, but manufacturing precision decreases

Engineering Contradiction:

Improvemanufacturing flexibilityVSAvoidpattern accuracy

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The silicon substrate enables the use of semiconductor manufacturing processes including photolithography and etching, which provide superior pattern accuracy and manufacturing precision compared to traditional mechanical fabrication methods, while maintaining design flexibility through standard fabrication workflows

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables the creation of smaller, more reliable piezoelectric actuators with enhanced manufacturing precision and mechanical strength, improving the performance of piezoelectric motors, robots, electronic component conveyance apparatuses, and printers.

Implementation Method 1

a vibrating part including a piezoelectric element

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS10680156B2Piezoelectric actuator, piezoelectric motor, robot, electronic component conveyance apparatus, printer, and manufacturing method of piezoelectric actuator

Publication Date: 2020.06.09 SEIKO EPSON CORP

AI summary

A piezoelectric actuator includes a vibrator having a vibrating part including a piezoelectric element and a transmitting portion provided in the vibrating part and transmitting drive power to a driven part, and an energizing part that may energize the vibrator toward the driven part, wherein the energizing part has a base portion connected to the vibrator and a pair of spring portions integrally formed with the base portion.