Piezoelectric Device Using Lanthanum Perovskite Buffer
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Solution Overview
Problem
Existing piezoelectric devices lack optimal piezoelectric characteristics, such as high piezoelectric constants and efficient deformation under voltage, which are essential for high-performance applications like inkjet printers and sensors.
Innovation Solution
A piezoelectric device comprising a substrate with a first conductive layer including a (001) preferentially oriented lanthanum-based layered perovskite compound buffer layer, a piezoelectric layer with a perovskite structure, and a second conductive layer, which enhances the piezoelectric properties by ensuring high orientation and low resistivity, thereby improving deformation and performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional piezoelectric layer is used, then the device structure is simple, but the piezoelectric characteristics are insufficient
Solution Approach 1:
The first conductive layer is divided into multiple functional layers: a buffer layer (lanthanum-based layered perovskite compound) and a conductive oxide layer. This segmentation allows each layer to perform its specific function - the buffer layer provides crystal orientation control while the conductive oxide layer ensures electrical conductivity, thereby improving piezoelectric characteristics without creating an overly complex structure.
Solution Approach 2:
The patent uses composite material structure combining lanthanum-based layered perovskite compound (buffer layer) with perovskite-type conductive oxide. This composite approach leverages the advantageous properties of both materials - the layered perovskite provides excellent (001) orientation while the conductive oxide ensures low resistivity, achieving superior piezoelectric characteristics.
2Productivity
If the piezoelectric layer is optimized for high piezoelectric constants, then the deformation efficiency improves, but the manufacturing complexity increases
Solution Approach 1:
The patent optimizes specific parameters of the buffer layer and conductive oxide layer, including their thicknesses, compositions, and crystal orientations. By carefully controlling these parameters, the device achieves high deformation efficiency while maintaining compatibility with existing manufacturing processes such as sputtering and chemical vapor deposition.
Solution Approach 2:
The buffer layer is formed beforehand to establish the (001) crystal orientation before depositing the piezoelectric layer. This preliminary action ensures that the piezoelectric layer inherits the favorable crystal orientation, thereby achieving high deformation efficiency without requiring complex post-processing or specialized manufacturing techniques.
3Manufacturing precision
If a (001) preferentially oriented buffer layer is introduced, then the piezoelectric constant increases, but the device structure becomes more complex
Solution Approach 1:
The buffer layer is specifically designed with (001) preferential orientation to provide local crystal orientation control at the interface with the piezoelectric layer. This localized quality improvement ensures high manufacturing precision for the piezoelectric layer's crystal structure without requiring the entire device structure to be overly complex.
Solution Approach 2:
The lanthanum-based layered perovskite compound acts as an intermediary buffer layer between the substrate and the piezoelectric layer. It mediates the crystal orientation relationship, enabling the piezoelectric layer to achieve (001) orientation while the buffer layer itself can be formed using relatively simple deposition processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed device exhibits excellent piezoelectric characteristics, enabling high piezoelectric constants and efficient deformation, leading to improved performance in applications like inkjet printers and sensors with increased efficiency and reduced power consumption.
Implementation Method 1
a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound
Implementation Method 2
a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure
Implementation Method 3
at least one low-resistivity layer formed of a conductive material having a resistivity lower than a resistivity of the conductive oxide
Data Source
AI summary
A piezoelectric device includes: a substrate; a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound; a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer electrically connected with the piezoelectric layer.