Piezoelectric Vibration Element Coupling Structure for Consistent Separation
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Solution Overview
Problem
The existing method of manufacturing piezoelectric vibrator elements, as disclosed in JP-A-2003-198303, faces issues with varying breaking positions and large remaining portions due to the arc-shaped notch in the coupling part, leading to inconsistent separation and potential interference with packaging.
Innovation Solution
A method involving wet etching to form a piezoelectric substrate with specific protruding and groove structures in the coupling portion, allowing for controlled breaking and reduced remaining portions by concentrating stress at the tip ends of protruding portions, ensuring consistent breaking positions and minimizing the folding trace.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If an arc-shaped notch is formed in the coupling part, then the coupling portion can be folded to separate the vibration element from the frame portion, but the breaking position varies and the remaining portion of the coupling portion becomes large
Solution Approach 1:
The patent changes the geometric parameters of the coupling portion by forming a linear groove instead of an arc-shaped notch, and by creating protruding portions with specific width variations. These parameter changes result in a consistent breaking position when the coupling portion is folded, resolving the issue of varying breaking positions while maintaining ease of separation.
2Ease of manufacture
If an arc-shaped notch is formed in the coupling part, then the coupling portion can be folded to separate the vibration element from the frame portion, but the remaining portion of the coupling portion becomes large
Solution Approach 1:
The patent modifies the geometric parameters of the coupling portion by creating a linear groove configuration and forming protruding portions with widths that decrease toward the groove. These parameter changes result in a smaller remaining portion after folding, reducing the folding trace size while maintaining the ease of separation provided by the groove structure.
3Manufacturing precision
If the coupling portion is designed with protruding portions and a groove, then the breaking position becomes consistent, but the structure becomes more complex
Solution Approach 1:
The patent applies segmentation by dividing the coupling portion into distinct regions: protruding portions and a groove portion. This segmentation creates a structured design that ensures consistent breaking positions while organizing the complexity into manageable, functionally distinct segments that can be manufactured systematically.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures a consistent breaking position and reduces the size of the folding trace, enhancing the manufacturing efficiency and compatibility with packaging, particularly in downsized vibration elements.
Implementation Method 1
manufacturing, by wet etching, a piezoelectric substrate including a vibration element, a frame portion, and a coupling portion
Data Source
AI summary
A method of manufacturing a vibration element includes: manufacturing, by wet etching, a piezoelectric substrate including a vibration element, a frame portion, and a coupling portion that couples the frame portion and the vibration element; and folding the vibration element at the coupling portion and separating the vibration element from the frame portion. In the manufacturing of the piezoelectric substrate by the wet etching, the coupling portion is formed with a first groove portion, and a first protruding portion and a second protruding portion. The first protruding portion has a first outer shape side that defines an outer shape of the coupling portion and a second outer shape side that defines a boundary between the first protruding portion and the first groove portion, and is formed in a shape in which a distance between the first outer shape side and the second outer shape side decreases as a distance from the outer shape side of the vibration element increases. The second protruding portion has a third outer shape side that defines the outer shape of the coupling portion and a fourth outer shape side that defines a boundary between the second protruding portion and the first groove portion, and is formed in a shape in which a distance between the third outer shape side and the fourth outer shape side decreases as a distance from the outer shape side of the vibration element increases.