Piezoelectric Element Titanium Intermediate Layer Diffusion Barrier
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Solution Overview
Problem
Existing piezoelectric elements with PZT films divided into two layers struggle to suppress platinum electrode diffusion, leading to inadequate orientation and electric characteristics, especially when thickness is increased.
Innovation Solution
Incorporating a titanium intermediate layer between the piezoelectric body layers, with a thickness of 2 nm to 6 nm, to reduce electrode component diffusion and enhance orientation ratio, while maintaining a total thickness of 1.6 μm to 10 μm, allowing for increased thickness and improved electric characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the PZT film is simply divided into two layers, then the diffusion of Pt from the Pt electrode to the PZT film is suppressed, but the diffusion is not sufficiently suppressed and the orientation and electric characteristics cannot be sufficiently improved when the thickness is increased
Solution Approach 1:
An intermediate layer containing titanium is introduced between the PZT layers to act as a diffusion barrier. This intermediate layer effectively suppresses Pt diffusion from the electrode to the PZT film while maintaining good piezoelectric characteristics and orientation, resolving the contradiction between diffusion suppression and orientation quality.
2Force
If the thickness of the piezoelectric element is increased, then the driving force is improved, but the diffusion of Pt and the orientation of the PZT film worsen
Solution Approach 1:
The titanium-containing intermediate layer serves as an effective diffusion barrier that allows the piezoelectric element thickness to be increased to 1.6 μm or more for improved driving force, while still suppressing Pt diffusion and maintaining good piezoelectric characteristics.
3Force
If the thickness of the piezoelectric element is increased, then the driving force is improved, but the orientation and electric characteristics cannot be sufficiently improved
Solution Approach 1:
The intermediate layer containing titanium maintains excellent orientation and electric characteristics even when the piezoelectric element thickness is increased to 1.6 μm or more, enabling improved driving force without sacrificing orientation quality.
4Reliability
If a titanium-containing intermediate layer is added, then the diffusion suppression and orientation are improved, but the device complexity increases
Solution Approach 1:
A single titanium-containing intermediate layer is introduced between the PZT layers, adding minimal structural complexity while effectively suppressing Pt diffusion and improving orientation. This simple addition resolves the contradiction between diffusion suppression and structural simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses electrode component diffusion, improves orientation ratio, and enhances electric characteristics, increasing the driving force in piezoelectric actuators, motors, robots, electronic component transporting apparatuses, and printers.
Implementation Method 1
a piezoelectric body layer which is disposed on the first electrode, and which has a plurality of layers configured to contain a piezoelectric body material
Data Source
AI summary
A piezoelectric element includes: a substrate; a first electrode which is disposed on the substrate; a piezoelectric body layer which is disposed on the first electrode, which has a plurality of layers configured to contain a piezoelectric body material, and in which the total thickness of the plurality of layers is within a range of 1.6 μm to 10 μm; and an intermediate layer which is disposed on an interlayer of the piezoelectric body layer, and which is configured to contain titanium.