Piezoelectric End Effector for Precise Substrate Alignment
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Solution Overview
Problem
Existing end effectors for substrate handling lack a mechanical clamping mechanism, relying on friction for substrate retention, which is inefficient and requires improved positioning and alignment mechanisms.
Innovation Solution
An end effector with a substrate-supporting body equipped with arrays of wave generators, utilizing piezoelectric elements to generate surface waves for precise substrate positioning and alignment, facilitated by a robotic arm capable of vertical, lateral, and forward movements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If friction-based substrate holding is used, then the end effector structure remains simple, but substrate positioning precision deteriorates
Solution Approach 1:
The patent replaces the traditional mechanical friction-based holding system with a piezoelectric actuation system. The piezoelectric elements generate precise mechanical displacements through electrical control, enabling accurate substrate positioning without relying on friction. This substitution of mechanical reliance with electro-mechanical control resolves the contradiction by achieving high positioning precision while maintaining relatively simple end effector structure.
Solution Approach 2:
The patent utilizes the piezoelectric effect to change the physical state of the end effector surface through electrical parameter control. By applying voltage to piezoelectric elements, the surface geometry is dynamically adjusted to create precise positioning forces. This parameter change approach enables accurate substrate holding without complex mechanical structures, resolving the positioning precision versus structural complexity contradiction.
2Device complexity
If no mechanical clamping mechanism is used, then the end effector design remains simple, but substrate positioning reliability deteriorates
Solution Approach 1:
The patent replaces traditional mechanical clamping mechanisms with a piezoelectric-based positioning system. The piezoelectric elements provide controlled mechanical forces through electrical actuation, achieving reliable substrate positioning without complex clamping structures. This substitution maintains simplicity while significantly improving positioning reliability through precise electro-mechanical control.
Solution Approach 2:
The piezoelectric elements inherently generate the necessary mechanical forces through their material properties when electrically actuated, eliminating the need for separate clamping mechanisms. The system uses the piezoelectric effect itself to provide both positioning and holding functions, achieving reliable substrate management through self-service piezoelectric actuation without additional mechanical complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances substrate positioning and alignment accuracy, ensuring stable transport and handling of substrates through the generation of surface waves, improving efficiency and reliability in substrate processing apparatuses.
Implementation Method 1
a first array of wave generators disposed in the substrate-supporting body and configured to generate a surface wave to a backside of the substrate
Implementation Method 2
The array of wave generators may comprise: a plurality of piezoelectric elements for generating surface waves
Data Source
AI summary
An End effector is disclosed. The exemplary end effector includes a substrate-supporting body for placing the substrate thereon; and a first array of wave generators disposed in the substrate-supporting body and configured to generate a surface wave to a backside of the substrate.