Piezoelectric Device Hydrogen Barrier for Manufacturing Reliability
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Solution Overview
Problem
Hydrogen-ions introduced during the manufacturing process degrade the reliability of piezoelectric devices, affecting their performance.
Innovation Solution
Incorporation of a multilayer hydrogen blocking layer to prevent hydrogen-ions from penetrating into the piezoelectric layer by forming a hydrogen blocking layer over the metal-insulator-metal element before hydrogen-ion containing processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If hydrogen-ion containing processing is performed during manufacturing, then manufacturing process can be completed, but hydrogen-ions penetrate into piezoelectric layer and degrade device reliability
Solution Approach 1:
A hydrogen blocking layer is introduced as an intermediary barrier between the piezoelectric layer and the external environment. This layer selectively blocks hydrogen-ion penetration while allowing the manufacturing process to proceed, thus protecting the piezoelectric layer from hydrogen contamination without preventing necessary manufacturing steps.
Solution Approach 2:
The hydrogen blocking layer is formed in advance before hydrogen-ion containing processing steps are performed. This preliminary protective action ensures that when subsequent manufacturing processes involving hydrogen-ions are conducted, the piezoelectric layer is already protected, preventing hydrogen penetration before it can occur.
2Reliability
If hydrogen blocking layer is added, then hydrogen-ion penetration is prevented and reliability improves, but device structure becomes more complex
Solution Approach 1:
Instead of making the entire device structure complex, the hydrogen blocking layer is applied locally only where hydrogen protection is needed - specifically between the piezoelectric layer and potential hydrogen sources. This localized approach maintains simplicity in other parts of the device while providing targeted protection.
Solution Approach 2:
The hydrogen blocking layer is formed using composite material structures (such as alternating layers of different materials) that provide effective hydrogen blocking capability. This allows achieving reliable protection with a relatively thin and integrated layer rather than requiring complex multi-component structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the reliability of piezoelectric devices by maintaining minimal hydrogen-ion presence, thereby preserving the piezoelectric characteristics and improving device performance.
Implementation Method 1
a hydrogen blocking layer is disposed on the metal-insulator-metal element... the hydrogen blocking layer is configured to prevent hydrogen-ions from penetrating into the piezoelectric layer
Implementation Method 2
When a voltage is applied, the electrical field generated by the applied voltage will cause the piezoelectric layer to stretch or compress
Data Source
AI summary
A piezoelectric device including a substrate, a metal-insulator-metal element, a hydrogen blocking layer, a passivation layer, a first contact terminal and a second contact terminal is provided. The metal-insulator-metal element is disposed on the substrate. The hydrogen blocking layer is disposed on the metal-insulator-metal element. The passivation layer covers the hydrogen blocking layer and the metal-insulator-metal element. The first contact terminal is electrically connected to the metal-insulator-metal element. The second contact terminal is electrically connected to the metal-insulator-metal element.