Pivotable Arm Maintenance Apparatus for Semiconductor Systems
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Solution Overview
Problem
Existing maintenance systems for semiconductor processing systems are cumbersome, inflexible, and costly, leading to prolonged downtimes, contamination risks, and ergonomic and safety concerns during maintenance of heavy and large components in clean room environments.
Innovation Solution
A compact, flexible maintenance apparatus with a pivotable arm and connecting unit, capable of horizontal and vertical movement, designed for easy adaptation to different components, featuring lubricant-free joints and a portable configuration, allowing for safe and efficient handling of heavy loads with minimal contamination risk.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If mobile maintenance cranes are used to lift and move system components, then the maintenance personnel can access components located below or inspect displaced components, but the cranes are cumbersome to operate, require moving away several system components first, cause cost-intensive downtimes, and create risk of contamination or damage
Solution Approach 1:
The maintenance apparatus is extracted from the traditional mobile crane concept and integrated directly into the system structure. The beam is mounted to the system frame, and the arm with lifting means is integrated as a fixed maintenance station, eliminating the need to move away system components and reducing downtime while providing direct access to underlying components
Solution Approach 2:
The arm is designed to be pivotable in a horizontal plane via a connecting unit that can be displaceable along the beam. This dynamic configuration allows the arm to reach different positions and angles, enabling access to various system components without requiring the entire apparatus to be moved or repositioned, thus reducing maintenance time and improving ease of operation
2Loss of time
If an integrated lifting assembly is used to reduce maintenance times, then the lifting operation is faster and requires less system disassembly, but the assembly is not flexible and is individually manufactured for a specific lifting task
Solution Approach 1:
The arm is designed to be pivotable in a horizontal plane via a connecting unit that can be displaceable along the beam. This dynamic configuration allows the arm to reach different positions and angles, enabling access to various system components with a single integrated apparatus, thus providing both speed and versatility
Solution Approach 2:
The maintenance apparatus is designed as a universal solution that can handle different system components through the pivotable arm and adjustable lifting means. The apparatus can be used for various lifting tasks throughout the system without requiring individual customized assemblies, achieving both integration efficiency and adaptability
3Ease of operation
If heavy system components are moved using traditional methods, then the components can be accessed and inspected, but safety and ergonomics compliance becomes difficult to ensure for the maintenance personnel
Solution Approach 1:
The manual handling of heavy components is replaced by an automated lifting mechanism. The arm is equipped with lifting means such as a gripper or fork that can automatically grasp and move heavy components, eliminating the need for personnel to manually handle heavy loads and ensuring safety and ergonomics compliance
Data Source
AI summary
A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.