Pixel Circuit Compensation for Nonlinear Border-Region Response

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Solution Overview

Problem

Sensor units with multiple pixel circuits exhibit non-linear response and varying pixel circuit responses, necessitating compensation for non-linearity and differences between pixel circuits to improve image quality.

Innovation Solution

A method and system for image acquisition and compensation that involves generating detection signals using pixel circuits with sub-circuits for different intensity ranges, determining pixel circuit gain functions based on border region values, and applying compensation functions to correct for differences between pixel circuits.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If pixel circuits are used to detect radiation intensity, then detection capability is provided, but non-linear response and varying responses between pixel circuits degrade measurement precision

Engineering Contradiction:
Improvedetection precisionVSAvoidresponse consistency
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent applies preliminary calibration to determine pixel circuit gain functions before actual imaging. Multiple images are acquired at different illumination intensities, and pixel circuit related values are determined in advance to establish gain functions that characterize each pixel circuit's non-linear response. This preliminary characterization enables subsequent compensation to correct response variations and non-linearities, improving measurement precision and response consistency.

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If multiple pixel circuits are used to expand detection coverage, then dynamic range is increased, but differences between pixel circuit responses increase complexity

Engineering Contradiction:
Improvedynamic rangeVSAvoidcompensation complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent utilizes parameter changes by acquiring multiple images at different illumination intensities to characterize pixel circuit gain functions. By varying the illumination intensity parameter across multiple measurements, the system extracts pixel circuit related values that define each pixel circuit's gain characteristics. This approach enables the system to handle multiple pixel circuits with different responses through mathematical modeling rather than hardware complexity, maintaining adaptability while managing complexity through software-based compensation.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If pixel circuit gain functions are determined using border region values, then compensation accuracy is improved, but data processing complexity increases

Engineering Contradiction:
Improvecompensation accuracyVSAvoidprocessing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies local quality by focusing on border region pixel circuits when determining gain functions. Specifically, pixel circuits located at borders between different intensity ranges are used to determine pixel circuit related values. This localized approach improves compensation accuracy at the critical transition regions where non-linear effects are most pronounced, while limiting the processing complexity to only the necessary subset of pixel circuits rather than requiring all pixel circuits to be fully characterized.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS20250365520A1Sensing circuit compensation
Publication Date: 2025.11.27 APPL MATERIALS ISRAEL LTD
  • US20250365520A1 patent drawing
  • US20250365520A1 patent drawing
  • US20250365520A1 patent drawing

AI summary

An inspection system that includes multiple pixel circuits, a readout circuit and a processing circuit. The multiple pixel circuits are configured to generate detection signals. The readout circuit is configured to read the detection signals. The processing circuit is configured to process the detection signals by applying one or more compensation functions. The one or more compensation functions are determined based on pixel circuit gain functions. For each pixel circuit, a pixel circuit gain function includes a set of a group of pixel circuit related values that include a sub-set of border region pixel circuit related values that are located within a border region of the pixel circuit dynamic range. The border region includes a border between the first part of the pixel circuit dynamic range and the second part of the pixel circuit dynamic range.