Display Device Pixel Electrode Gate Transmission Member Single Mask Process
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Solution Overview
Problem
Liquid crystal display (LCD) devices in the plane to line switching (PLS) mode require a greater number of mask processes, increasing manufacturing costs and complexity compared to twisted nematic (TN) mode.
Innovation Solution
A method to form a pixel electrode and a gate transmission member in a single mask process using a self-assembled monolayer etch stop layer, allowing for simultaneous formation of conductive layers and reducing the number of manufacturing steps.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple mask processes are used to form pixel electrode and gate transmission member in PLS mode, then the display device achieves wide viewing angle and line switching mode performance, but the number of manufacturing processes and manufacturing costs increase
Solution Approach 1:
The patent combines the formation of pixel electrode and gate transmission member into a single mask process. The mask pattern simultaneously defines both structures, and a single etching process creates both features. This merging of operations reduces the total number of manufacturing steps while maintaining the functional requirements for wide viewing angle and line switching mode operation.
2Manufacturing precision
If multiple mask processes are used to form pixel electrode and gate transmission member, then the display device achieves required structural precision, but manufacturing costs and process time increase
Solution Approach 1:
The patent merges multiple patterning and etching operations into a single mask process. The mask is designed with patterns that simultaneously define the pixel electrode and gate transmission member geometries. A single etching process then creates both structures with the required precision, eliminating the need for sequential mask applications and intermediate steps, thereby improving manufacturing efficiency while maintaining structural precision.
Solution Approach 2:
The mask pattern is designed in advance to pre-definŠµ the geometries of both pixel electrode and gate transmission member. The etching parameters are optimized beforehand to achieve the required structural precision in a single pass. This preliminary planning and design of the mask pattern and process parameters enables high-precision manufacturing without requiring multiple iterative processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces manufacturing processes and costs by enabling the formation of a pixel electrode and gate transmission member in a single mask process, improving manufacturing efficiency and potentially enhancing display performance.
Implementation Method 1
forming an etch stop layer on the gate transmission member and the residual pattern; removing the residual pattern to thereby form an etch stop layer pattern through which the second conductive layer pattern of the pixel electrode pattern is exposed
Implementation Method 2
The etch stop layer may include a self-assembled monolayer. The self-assembled monolayer may include a compound represented by the following Chemical Formula 1
Data Source
AI summary
A display device capable of reducing the number of manufacturing processes and manufacturing costs and a method of manufacturing the display device are provided, the display device including: a first substrate; a gate transmission member and a pixel electrode on the first substrate; a gate insulating layer on the gate transmission member and the pixel electrode; a semiconductor layer on the gate insulating layer, the semiconductor layer overlapping a gate electrode of the gate transmission member; and a source electrode and a drain electrode on the semiconductor layer, wherein the gate transmission member includes a first conductive layer pattern and a second conductive layer pattern on the first conductive layer pattern, the first conductive layer pattern including a material the same as a material forming the pixel electrode.