Photovoltaic Pixel Element Isolation for Crosstalk Reduction

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Solution Overview

Problem

Photovoltaic type pixels suffer from crosstalk, large temperature-dependent pixel signal variations, low low-illuminance sensitivity, and increased dark current due to the PN junction diode's characteristics, limiting dynamic range and image quality.

Innovation Solution

Incorporating element isolation regions between photoelectric conversion regions of adjacent pixels to block signal charge diffusion and using a combination of photovoltaic and accumulation type pixels with a PN junction diode, transfer gate, and floating diffusion to generate and process photovoltaic power, thereby suppressing crosstalk and enhancing sensitivity and signal-to-noise ratio.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If photovoltaic type pixels with PN junction diodes are used, then dynamic range is improved and saturation is avoided, but crosstalk occurs due to electron diffusion from N-type region to P-type substrate

Engineering Contradiction:
Improvedynamic rangeVSAvoidcrosstalk
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

An element isolation region is introduced as an intermediary structure between adjacent photovoltaic type pixels. This isolation region acts as a barrier that prevents electron diffusion from the N-type region of one pixel to the P-type substrate of an adjacent pixel, thereby eliminating crosstalk while preserving the photovoltaic effect and wide dynamic range capabilities of the original pixel structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If photovoltaic type pixels are used, then saturation is avoided, but pixel signal voltage decreases markedly with temperature increase due to exponential increase in reverse saturated current

Engineering Contradiction:
Improvedynamic rangeVSAvoidtemperature dependence of pixel signal
Core Design Contradiction:
Adaptability or versatilityVSTemperature

Solution Approach 1:

The patent introduces element isolation regions that modify the electrical parameters of the pixel structure by providing controlled isolation paths. This changes the current flow characteristics and reduces the temperature-dependent variations in pixel signal voltage while maintaining the photovoltaic power generation mechanism.

Inventive Principle:
Principle #35Parameter changes

3Object-generated harmful factors

If element isolation regions are added to block electron diffusion, then crosstalk is suppressed, but device complexity increases

Engineering Contradiction:
ImprovecrosstalkVSAvoidpixel structure complexity
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The patent applies segmentation by dividing the semiconductor substrate into isolated pixel regions using element isolation regions. Each pixel is segmented from its neighbors by these isolation structures, which are formed as standardized regions between pixels. This segmentation approach systematically addresses crosstalk while maintaining manufacturing feasibility through regular, repeating patterns.

Inventive Principle:
Principle #1Segmentation

4Adaptability or versatility

If accumulation type operation is used, then saturation charge amount limits dynamic range, but photovoltaic type operation avoids saturation

Engineering Contradiction:
Improvedynamic rangeVSAvoidpixel operation mode
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent enables the pixel to function universally in both accumulation type and photovoltaic type operations. The same pixel structure with the added element isolation region can operate in accumulation mode for standard imaging or switch to photovoltaic mode for high dynamic range applications, providing multi-functionality without requiring separate dedicated pixel structures for each operation mode.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces crosstalk, improves low-illuminance sensitivity, and maintains image quality by isolating signal charges and utilizing dual pixel types, achieving a wider dynamic range and better signal-to-noise performance.

Implementation Method 1

photovoltaic power proportional to a logarithm of a photocurrent value depending on incident light 2 is generated by a PN junction diode 3

Methodology Applied
Scientific EffectPhotovoltaic effect: Photovoltaic Effect

Implementation Method 2

element isolation region that is provided between the photoelectric conversion regions of adjacent pixels and in a state of substantially surrounding the photoelectric conversion region

Methodology Applied
Scientific EffectDiffusion blocking: Diffusion Barrier

Data Source

PatentEP3097589B1Imaging device and electronic apparatus
Publication Date: 2022.07.06 SONY SEMICON SOLUTIONS CORP
  • EP3097589B1 patent drawingFigure 1
  • EP3097589B1 patent drawingFigure 2
  • EP3097589B1 patent drawingFigure 3

AI summary

There is provided an imaging device that includes photovoltaic type pixels that have photoelectric conversion regions generating photovoltaic power for each pixel depending on irradiation light; and an element isolation region that is provided between the photoelectric conversion regions of adjacent pixels and in a state of substantially surrounding the photoelectric conversion region.