Pixel Sensor Lens Structure for Near-Infrared Quantum Efficiency

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Solution Overview

Problem

CMOS image sensors exhibit low quantum efficiency for near infrared light, leading to inadequate sensitivity in low-light conditions, despite modifications like germanium single-photon avalanche photodiodes and isolation grids, which fail to meet performance thresholds.

Innovation Solution

Incorporating a lens structure with a convex surface, an optical spacer, and anti-reflective coatings to redirect and enhance the absorption of near infrared light by the photodiode, increasing quantum efficiency and sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If germanium single-photon avalanche photodiodes and isolation grids are used, then sensitivity to near infrared light is improved, but quantum efficiency remains below performance thresholds

Engineering Contradiction:
ImprovesensitivityVSAvoidquantum efficiency
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The pixel sensor structure is segmented into distinct functional regions: a photodiode sensor structure for light detection, an isolation grid structure for electrical isolation, and a lens structure for optical focusing. This segmentation allows each component to be optimized independently, with the lens structure specifically designed to redirect near-infrared light onto the photodiode surface, thereby improving quantum efficiency while maintaining the sensitivity enhancements from the germanium photodiode and isolation grid

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A lens structure acts as an intermediary component between the incident near-infrared light and the photodiode sensor structure. This lens redirects and focuses the near-infrared light onto the photodiode surface, serving as a mediating element that enhances light coupling and improves quantum efficiency without interfering with the sensitivity-enhancing features of the germanium photodiode and isolation grid

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If lens structure and optical spacer are added, then quantum efficiency and sensitivity are improved, but device complexity increases

Engineering Contradiction:
Improvequantum efficiencyVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The lens structure, optical spacer, and photodiode are combined into an integrated pixel sensor structure where the lens is positioned directly over the photodiode with the optical spacer maintaining a specific separation distance. This merging of components into a unified structure achieves improved quantum efficiency through enhanced near-infrared light coupling while minimizing the complexity increase by integrating rather than adding separate subsystems

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The optical spacer introduces a controlled vertical dimension between the lens structure and photodiode surface, creating a specific separation distance that optimizes light focusing. This dimensional approach allows the lens to focus near-infrared light onto the photodiode surface from an optimized focal distance, improving quantum efficiency while maintaining a compact overall structure that doesn't excessively increase device complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly improves quantum efficiency and sensitivity of CMOS image sensors in low-light environments, reducing resource consumption and meeting performance thresholds.

Implementation Method 1

The lens structure redirects near infrared light through the optical spacer structure and to the photodiode sensor structure

Methodology Applied
Scientific EffectLight redirection: Refraction

Implementation Method 2

As the photodiode is exposed to light, an electrical charge is induced in the photodiode (referred to as a photocurrent)

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20250248156A1Semiconductor device and methods of manufacturing the same
Publication Date: 2025.07.31 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250248156A1 patent drawing
  • US20250248156A1 patent drawing
  • US20250248156A1 patent drawing

AI summary

Some implementations herein include a pixel sensor structure and methods of forming. The pixel sensor structure includes a lens structure, a photodiode sensor structure, and an optical spacer structure between the lens structure and the photodiode sensor structure. The lens structure redirects near infrared light through the optical spacer structure and to the photodiode sensor structure to improve the quantum efficiency performance of the photodiode sensor structure relative to another photodiode sensor structure include in a pixel sensor structure without the lens structure and the optical spacer structure. Additionally, different configurations of an anti-reflection coating layer may be included throughout the pixel sensor structure to improve the quantum efficiency performance of the photodiode sensor structure further.