Pixel Unit Data Line Formation for Short-Circuit Prevention
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Solution Overview
Problem
In large-sized liquid crystal displays with high resolution, the design rule for pixel structures becomes tougher, leading to potential short-circuits and affected display quality due to connections between data lines and conductors within contact holes during the manufacturing process.
Innovation Solution
The method involves forming a data line before a conductor connected to the channel layer, with at least one insulation layer step in between, to prevent short-circuits, and includes a parallel auxiliary electrode configuration to reduce impedance and RC values, allowing for a broader design rule and improved yield.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the data line is formed after the conductor in the contact hole, then the manufacturing process follows conventional sequence, but short-circuit occurs between data line and conductor
Solution Approach 1:
The data line is formed in advance before the conductor filling process. Specifically, the data line is formed in the second insulation layer before the contact hole is etched and before the conductor is filled into the contact hole. This preliminary formation of the data line prevents any potential short-circuit with the conductor that will be filled later, while maintaining a manageable process sequence.
2Measurement precision
If the design rule is made tighter for high resolution, then display resolution is improved, but manufacturing yield decreases due to short-circuit risks
Solution Approach 1:
By forming the data line before the conductor filling process, the invention eliminates the risk of short-circuit even when design rules are tight. This allows high-resolution displays to be manufactured with maintained yield, as the data line position is fixed before conductor deposition, preventing any overlap or contact issues.
Solution Approach 2:
The invention separates the data line and conductor in the vertical dimension by forming the data line in the second insulation layer at a lower level, while the conductor is filled into the contact hole at a higher level. This vertical separation prevents short-circuit while allowing tight horizontal design rules for high resolution.
3Ease of manufacture
If the data line and conductor are in the same plane, then manufacturing is simpler, but short-circuit occurs affecting display quality
Solution Approach 1:
The invention moves the data line to a different vertical level (in the second insulation layer) compared to the conductor (in the contact hole). This vertical separation in the third dimension maintains manufacturing simplicity while effectively preventing short-circuit and ensuring display quality.
Data Source
AI summary
A method for manufacturing a pixel unit includes the following steps. A channel layer is formed. A first pattern layer is formed above the channel layer and includes a scan line and a gate electrode. A second pattern layer is formed above the first pattern layer and includes a data line and a source electrode, where the source electrode is electrically connected to the channel layer. A third pattern layer is formed above the second pattern layer and includes a drain electrode and an auxiliary electrode, where the drain electrode is electrically connected to the channel layer. The auxiliary electrode is electrically connected to the scan line through a first contact hole.