Planar Vibrating Gyroscope with Coupled Resonators for Mode Degeneracy
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Solution Overview
Problem
Existing integrating gyroscopes face issues such as high sensitivity to mounting conditions, loss of degeneracy in vibration modes, and complex manufacturing processes, leading to energy losses and reduced sensitivity.
Innovation Solution
A new angular inertial sensor design featuring at least three symmetrically arranged resonators with a coupling element, allowing for degenerate vibration modes that are invariant under rotation, and a balanced resonator configuration to minimize energy losses and maintain degeneracy, suitable for low-cost manufacturing using collective etching processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If hemispherical resonators or bells are used for integrating gyroscopes, then the inertiality of vibration can be achieved, but the manufacturing complexity increases and mounting sensitivity becomes high
Solution Approach 1:
The resonator is divided into multiple identical segments (at least three) arranged symmetrically around the sensitive axis. Each segment is a simplified structure that can be manufactured using standard batch processes, avoiding the need for complex hemispherical resonators while maintaining the required inertial properties through symmetric arrangement.
Solution Approach 2:
The invention uses symmetric arrangement of identical segments around the sensitive axis, creating rotational invariance. This symmetric configuration ensures that the gyroscope's performance is insensitive to mounting asymmetries, resolving the mounting sensitivity issue while maintaining manufacturing simplicity.
2Power
If traditional resonator configurations are used, then vibration modes can be excited, but energy losses increase and quality factor decreases
Solution Approach 1:
The coupling element is designed with specific geometric properties (different inertiasIx and Iy) to create controlled asymmetry in the coupling mechanism. This local asymmetric design enables effective coupling between vibration modes while maintaining low energy losses, achieving high quality factor through optimized local structure rather than requiring perfect symmetry throughout the entire resonator.
3Manufacturing precision
If complex manufacturing processes are used, then precise resonator structures can be achieved, but manufacturing efficiency decreases and cost increases
Solution Approach 1:
The resonator segments and coupling element are designed as standardized components that can be manufactured using common batch fabrication processes. The symmetric arrangement allows identical segments to be produced simultaneously, and the coupling element with its defined geometric properties can be integrated using standard techniques, achieving both precision and manufacturing efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves high sensitivity and quality factor by reducing energy losses and insensitivity to mounting asymmetries, enabling high-performance integrating gyroscopes with improved manufacturing efficiency.
Implementation Method 1
it is the Coriolis force that produces a coupling between two natural modes, such that a vibration excited according to one of the two natural modes is transferred partially or totally to the other natural mode
Implementation Method 2
For resonators made of piezoelectric materials, the useful excitation of a vibration by the piezoelectric effect and the useful signal that is detected are no longer displacements, but mechanical stress or deformation
Data Source
Figure 1a~1c
Figure 2a~2c
Figure 3a~3c
AI summary
An inertial angular sensor comprises at least three identical resonators (R1-R3) which are arranged symmetrically around a sensing axis (A-A) of the sensor, such that a gyroscope that is formed on the basis of said sensor possesses an integrating operation. The sensor further comprises a coupling element (Ec) which links a vibrating portion of each resonator to the vibrating portions of all of the other resonators of the sensor. Preferred configurations for the inertial angular sensor make it possible to obtain integrating gyroscopes with high sensitivity at low production cost.