Plasma Processing Annular Member Pneumatic Elevation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In plasma processing apparatuses, the consumption of annular members such as focus rings and cover rings leads to deteriorating etching characteristics at the outer periphery of substrates, and existing solutions complicate the system with mechanical elevating mechanisms.
Innovation Solution
The apparatus employs annular members with protrusions and grooves featuring threads along the circumferential direction, where the pressure in the chamber is controlled to generate a driving force for rotating these members, allowing vertical movement without a mechanical elevating mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mechanical elevating mechanism is provided to raise the annular member in response to its consumption, then the annular member can be vertically moved to maintain etching uniformity, but the device complexity increases
Solution Approach 1:
The patent replaces the mechanical elevating mechanism with a pressure-based system. By controlling the pressure in the chamber, the annular member is lifted vertically without mechanical contact. The pressure differential between the chamber interior and exterior creates an upward force that raises the annular member, eliminating the need for complex mechanical elevators while maintaining etching uniformity.
Solution Approach 2:
The patent uses pressure control (pneumatic principle) to achieve vertical movement of the annular member. A pressure control unit adjusts the pressure inside the chamber, creating a pressure differential that generates an upward lifting force on the annular member. This pneumatic approach replaces mechanical elevation mechanisms and enables precise vertical positioning to maintain etching uniformity.
2Ease of operation
If the pressure in the chamber is controlled to generate a driving force for rotating the annular member, then the annular member can be rotated without mechanical contact, but the control complexity increases
Solution Approach 1:
The patent replaces mechanical rotation mechanisms with pressure-driven rotation. By controlling the pressure distribution in the chamber, a driving force is generated that rotates the annular member without mechanical contact. This substitution eliminates mechanical friction and wear while enabling smooth rotation, though it requires a pressure control system to manage the pressure distribution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively raises and lowers annular members, maintaining etching uniformity and simplifying the apparatus by eliminating the need for complex mechanical elevating mechanisms, thus preventing deterioration of etching characteristics.
Implementation Method 1
a pressure control unit configured to control a pressure in the chamber such that a driving force for rotating the annular member in the circumferential direction is obtained
Implementation Method 2
the groove or the protrusion having a first thread formed on a side surface thereof along the circumferential direction; the protrusion or the groove of the support unit having a second thread formed on a side surface thereof along the circumferential direction
Data Source
AI summary
An apparatus for a plasma processing includes an annular member, a support unit, a chamber and a pressure control unit. The annular member has a groove or a protrusion circumferentially formed on a bottom surface thereof, the groove or the protrusion having a first thread circumferentially formed on a side surface. The support unit has a protrusion or a groove circumferentially formed on a placing surface on which the annular member is placed such that the groove or the protrusion of the annular member is fitted with the protrusion or the groove of the support unit, the protrusion or the groove of the support unit having a second thread circumferentially formed on a side surface thereof. The chamber has therein the support unit. Further, the pressure control unit controls a pressure in the chamber such that a driving force for circumferentially rotating the annular member is obtained.