Plasma Processing Chamber Segmentation for Targeted Maintenance
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Solution Overview
Problem
Conventional plasma processing apparatuses require disassembling all components for maintenance, even when only a part is targeted, leading to inefficient maintenance operations.
Innovation Solution
A plasma processing apparatus with a vertically two-divided processing chamber configuration, allowing for selective detachment and reassembly of components using elevating and fixing mechanisms, enabling efficient maintenance without disassembling the entire chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the processing chamber is disassembled into individual pieces for maintenance, then the components can be independently maintained, but the disassembly and assembly operations become time-consuming and complex
Solution Approach 1:
The processing chamber is segmented into modular components (lid body, bottom member, cylindrical electrode, insulating materials) that can be independently maintained. The holding member integrates these segments, allowing selective disassembly of only the required component for maintenance while keeping other parts assembled, thus reducing maintenance time compared to complete disassembly.
2Ease of repair
If all components are disassembled for maintenance, then any component can be accessed, but the operational efficiency is reduced due to complete disassembly requirements
Solution Approach 1:
The holding member provides a dynamic assembly system where components can be selectively attached and detached. This allows the processing chamber to transition between fully assembled and partially disassembled states, enabling maintenance of specific components without requiring complete disassembly, thereby maintaining higher operational efficiency.
3Ease of operation
If the cylindrical electrode and insulating materials are held integrally by the holding member, then disassembly and assembly operations are simplified, but maintenance of individual components becomes less flexible
Solution Approach 1:
The holding member serves multiple functions: it integrates the cylindrical electrode and insulating materials for simplified handling during assembly, yet allows selective release of individual components for maintenance. This multi-functionality enables both simplified operations and flexible maintenance access, resolving the contradiction between operational simplicity and maintenance adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates quick and efficient maintenance by allowing targeted disassembly and reassembly of components, reducing maintenance time and improving operational efficiency.
Implementation Method 1
The high-frequency power supply unit applies high-frequency voltage to the cylindrical electrode
Implementation Method 2
annular permanent magnets which are provided on the outer circumferential surfaces of the upper and lower insulating materials respectively
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The present invention relates to a plasma processing apparatus in which it is possible to efficiently perform maintenance of a processing chamber. A plasma processing apparatus 1 has a processing chamber 11 including a lower chamber 12 and an upper chamber 13, a platen 20 on which a silicon substrate K is placed, a processing gas supply device 27, coils 32, high-frequency power supply unit for coil 33, an elevating board 41 with a through hole 41 a provided to be vertically movable, an elevating mechanism 42 for supporting and moving up and down the elevating board 41, and a fixing mechanism 46 for fixing the upper chamber 13. The fixing member 46 is configured from a fixing board 47, first fixing bolts 48, 49 for connecting and fixing an top plate 16 to the elevating board 41 using the fixing board 47, second fixing bolts 50 for fixing a flange portion 32b of a holding member 32 to an annular plate 14, and third fixing bolts 51 for fixing the annular plate 14 to a sidewall 12a of the lower chamber 12.